Correction of Scanning Steps to Improve Accuracy in Interferometric Profilometer

E. Sysoev; R. Kulikov; I. Vykhristyuk; Yu. Chugui

doi:10.1515/msr-2015-0002

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Correction of Scanning Steps to Improve Accuracy in Interferometric Profilometer

Measurement Science Review

Volume 15 (2015): Issue 1 (February 2015)

By: E. Sysoev, R. Kulikov, I. Vykhristyuk and Yu. Chugui

Open Access

|Mar 2015

Abstract

In scanning interferometry of longitudinal shift, an uncertainty of required phase shift performance leads to a measurement error. Such uncertainty can be caused by external factors (vibrations, air turbulence in measuring area etc.) as well as inaccuracy of the scanning system. The method for calculating the phase shift between interferograms, which allows reducing the measurement error, is proposed. The results of numerical and full scale experiments are presented.

References

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Articles in this issue

DOI: https://doi.org/10.1515/msr-2015-0002 | Journal eISSN: 1335-8871

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Language: English

Page range: 9 - 12

Submitted on: Oct 3, 2014

Accepted on: Jan 24, 2015

Published on: Mar 11, 2015

Published by: Slovak Academy of Sciences, Institute of Measurement Science

In partnership with: Paradigm Publishing Services

Publication frequency: Volume open

Keywords:

Phase shifting interferometry,

nanorelief measurement,

measurement error

Related subjects:

Engineering,

Electrical engineering,

Control engineering, metrology and testing

© 2015 E. Sysoev, R. Kulikov, I. Vykhristyuk, Yu. Chugui, published by Slovak Academy of Sciences, Institute of Measurement Science
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

Volume 15 (2015): Issue 1 (February 2015)