References
- [1] Jiang, X., Wang, K., Gao, F., Muhamedsalih, H., (2010). Fast surface measurement using wavelength scanning interferometry with compensation of environmental noise. Applied Optics, 49 (15), 2903-2909.10.1364/AO.49.002903
- [2] Guzhov, V.I., Il'yinykh, S.P., Khaidukov, D.S., Vagizov, A.R. (2011). Eliminating phase-shift errors in interferometry. Optoelectronics, Instrumentation and Data Processing, 47 (1), 67-80.10.3103/S8756699011010110
- [3] Davila, A., Huntley, J.M., Pallikarakis, C., Ruiz, P.D., Coupland, J.M. (2012). Simultaneous wavenumber measurement and coherence detection using temporal phase unwrapping. Applied Optics, 51, 558-567.10.1364/AO.51.000558
- [4] Li, J., Wang, Yu., Meng, X., Yang, X., Wang, Q. (2013). An evaluation method for phase shift extraction algorithms in generalized phase-shifting interferometry. Journal of Optics, 15 (10), 5408.10.1088/2040-8978/15/10/105408
- [5] Fleischer, M., Windecker, R., Tiziani, H.J. (2001). Theoretical limits of scanning white-light interferometry signal evaluation algorithms. Applied Optics, 40 (17), 2815-2820.10.1364/AO.40.002815
- [6] Sysoev, E.V. (2007). White-light interferometer with partial correlogram scanning. Optoelectronics, Instrumentation and Data Processing, 43 (1), 83-89.10.3103/S8756699007010128
- [7] Sysoev, E.V., Vykhristuk, I.A., Kulikov, R.V., Potashnikov, A.K., Razum, V.A., Stepnov, L.M. (2010). Interference microscope-profilometer. Optoelectronics, Instrumentation and Data Processing, 46 (2), 198-205.10.3103/S8756699010020111
- [8] Sheglov, D.V., Kosolobov, S.S., Fedina, L.I., Rodyakina, E.E., Gutakovskii, A.K., Sitnikov, S.V., Kozhukhov, A.S., Zagarskikh, S.A., Kopytov, V.V., Evgrafov, V.I., Shuvalov, G.V., Matveichuk, V.F., Latyshev, A.V. (2013). High-precision nanoscale length measurement. Nanotechnologies in Russia, 8 (7-8), 518-531.10.1134/S1995078013040162