Correction of Scanning Steps to Improve Accuracy in Interferometric Profilometer
By: E. Sysoev, R. Kulikov, I. Vykhristyuk and Yu. Chugui
DOI: https://doi.org/10.1515/msr-2015-0002 | Journal eISSN: 1335-8871
Language: English
Page range: 9 - 12
Submitted on: Oct 3, 2014
Accepted on: Jan 24, 2015
Published on: Mar 11, 2015
Published by: Slovak Academy of Sciences, Institute of Measurement Science
In partnership with: Paradigm Publishing Services
Publication frequency: Volume open
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© 2015 E. Sysoev, R. Kulikov, I. Vykhristyuk, Yu. Chugui, published by Slovak Academy of Sciences, Institute of Measurement Science
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.