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Correction of Scanning Steps to Improve Accuracy in Interferometric Profilometer Cover

Correction of Scanning Steps to Improve Accuracy in Interferometric Profilometer

Measurement Science Review
Volume 15 (2015): Issue 1 (February 2015)
By: ,  ,   and    
Open Access
|Mar 2015
Authors

Authors

E. Sysoev

R. Kulikov

I. Vykhristyuk

Yu. Chugui

chugui@tdisie.nsc.ru

DOI: https://doi.org/10.1515/msr-2015-0002 | Journal eISSN: 1335-8871
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Language: English
Page range: 9 - 12
Submitted on: Oct 3, 2014
Accepted on: Jan 24, 2015
Published on: Mar 11, 2015
Published by: Slovak Academy of Sciences, Institute of Measurement Science
In partnership with: Paradigm Publishing Services
Publication frequency: Volume open
Keywords:
Phase shifting interferometry,
nanorelief measurement,
measurement error
Related subjects:
Engineering,
Electrical engineering,
Control engineering, metrology and testing

© 2015 E. Sysoev, R. Kulikov, I. Vykhristyuk, Yu. Chugui, published by Slovak Academy of Sciences, Institute of Measurement Science
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

Volume 15 (2015): Issue 1 (February 2015)
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