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Correction of Scanning Steps to Improve Accuracy in Interferometric Profilometer Cover

Correction of Scanning Steps to Improve Accuracy in Interferometric Profilometer

Open Access
|Mar 2015

Abstract

In scanning interferometry of longitudinal shift, an uncertainty of required phase shift performance leads to a measurement error. Such uncertainty can be caused by external factors (vibrations, air turbulence in measuring area etc.) as well as inaccuracy of the scanning system. The method for calculating the phase shift between interferograms, which allows reducing the measurement error, is proposed. The results of numerical and full scale experiments are presented.

Language: English
Page range: 9 - 12
Submitted on: Oct 3, 2014
Accepted on: Jan 24, 2015
Published on: Mar 11, 2015
Published by: Slovak Academy of Sciences, Institute of Measurement Science
In partnership with: Paradigm Publishing Services
Publication frequency: Volume open

© 2015 E. Sysoev, R. Kulikov, I. Vykhristyuk, Yu. Chugui, published by Slovak Academy of Sciences, Institute of Measurement Science
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.