Recent Advances on Vibration Sensors and Calibration Methods for the Operation and Maintenance of Mechanical Equipment

Xin Su; Jiewei Liu; Jiaen Xu; Peng Chen

doi:10.2478/msr-2025-0015

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Recent Advances on Vibration Sensors and Calibration Methods for the Operation and Maintenance of Mechanical Equipment

Measurement Science Review

Volume 25 (2025): Issue 3 (June 2025)

By: Xin Su, Jiewei Liu, Jiaen Xu and Peng Chen

Open Access

|Jun 2025

Abstract

Vibration is a common phenomenon in construction, military, manufacturing and other fields. Dangerous vibrations can directly affect the service life and efficiency of equipment. Vibration analysis is the most important method to prevent the occurrence of these equipment malfunctions. Vibration measurements are indispensable for vibration analysis. Currently, there is a great demand for vibration measurement and detection in industrial systems, and the requirements for the accuracy of measurement results are increasing. Therefore, we provide a brief literature review on the accurate measurement of the vibration, including the sensors, vibration sensor calibration equipment and procedures.

References

The Editors of Encyclopaedia Britannica. (2025). vibration. In Encyclopedia Britannica. https://www.britannica.com/science/vibration
Search in Google Scholar Back to article
Hao, G., Yang, Y., Yu, H., Tan, Y., Hu, E., Zhang, M. (2023). A mechanical vibration fault diagnosis method of generator circuit breaker based on deep residual network. In 2023 IEEE 4th International Conference on Electrical Materials and Power Equipment (ICEMPE). IEEE. https://doi.org/10.1109/ICEMPE57831.2023.10139395
Search in Google Scholar Back to article
Li, W., Zou, W., Fu, J., Gao, F., Yu, M. (2023). Development of an anti-vibration aircraft model support system with magnetorheological annular squeeze dampers for wind tunnel. In Mechanical Systems and Signal Processing, 202, 110663. https://doi.org/10.1016/j.ymssp.2023.110663
Search in Google Scholar Back to article
International Organization for Standardization (ISO). (2010). Mechanical vibration and shock — Vibration of fixed structures — Guidelines for the measurement of vibrations and evaluation of then-effects on structures. ISO 4866:2010. https://www.iso.org/standard/38967.html
Search in Google Scholar Back to article
Yılmaz, A. M., Boyacı, A., Ekti, A. R., Yarkan, S. (2024). An experimental setup for mechanical vibration analysis using VLC. In 2024 32nd Signal Processing and Communications Applications Conference (SIU). IEEE. https://doi.org/10.1109/SIU61531.2024.10600982
Search in Google Scholar Back to article
Doshi, S., Katoch, A., Suresh, A., Razak, F. A., Datta, S., Madhavan, S., Zanhar, C. M., Gundabattini, E. (2021). A review on vibrations in various turbomachines such as fans, compressors, turbines and pumps. Journal of Vibration Engineering & Technologies, 9 (7), 1557–1575. https://doi.org/10.1007/s42417-021-00313-x
Search in Google Scholar Back to article
Zhao, M., Shen, X., Jiang, F. (2023). Research on mechanical vibration measurement method based on event camera. In 2023 3rd International Conference on Energy Engineering and Power Systems (EEPS). IEEE, 528–532. https://doi.org/10.1109/EEPS58791.2023.10257083
Search in Google Scholar Back to article
Sun, L., Ma, Y., Xie, T., Kang, H., Li, Z., He, R. (2023). A review of hydraulic and mechanical vibration characteristics of pumped storage units. In 2023 6th International Conference on Power and Energy Applications (ICPEA). IEEE, 50–58. https://doi.org/10.1109/ICPEA59834.2023.10398696
Search in Google Scholar Back to article
Misra, A., Jayachandran, S., Kenche, S., Katoch, A., Suresh, A., Gundabattini, E., Selvaraj, S. K., Legesse, A. A. (2022). A review on vertical take-off and landing (VTOL) tilt-rotor and tilt wing unmanned aerial vehicles (UAVs). Journal of Engineering. https://doi.org/10.1155/2022/1803638
Search in Google Scholar Back to article
Doshi, S., Katoch, A., Suresh, A., Razak, F. A., Datta, S., Madhavan, S., Zanhar, C. M., Gundabattini, E. (2021). A review on vibrations in various turbomachines such as fans, compressors, turbines and pumps. Journal of Vibration Engineering & Technologies, 9 (7), 1557–1575. https://doi.org/10.1007/s42417-021-00313-x
Search in Google Scholar Back to article
Lu, J., Yuan, S., Parameswaran, S., Yuan, J., Si, Q. (2017). Investigation on the vibration and flow instabilities induced by cavitation in a centrifugal pump. Advances in Mechanical Engineering, 9 (4). https://doi.org/10.1177/1687814017696225
Search in Google Scholar Back to article
Lu, Y., Tan, L., Zhao, X., Ma, C. (2024). Experiment on cavitation-vibration correlation of a centrifugal pump under steady state and start-up conditions in energy storage station. In Journal of Energy Storage, 83, 110763. https://doi.org/10.1016/j.est.2024.110763
Search in Google Scholar Back to article
Fahmi, A. T. W. K., Kashyzadeh, K. R., Ghorbani, S. (2022). A comprehensive review on mechanical failures cause vibration in the gas turbine of combined cycle power plants. Engineering Failure Analysis, 134, 106094. https://doi.org/10.1016/j.engfailanal.2022.106094
Search in Google Scholar Back to article
Sharma, C., Kumar, S., Singh, A., Hire, K. R. B., Karnatak, V., Pandey, V., Gupta, J., Shrimali, R., Singh, S., Noorsha, S. S., Gundabattini, E. (2021). Comprehensive review on leading edge turbine blade cooling technologies. International Journal of Heat & Technology, 39 (2), 403–416. https://doi.org/10.18280/ijht.390209
Search in Google Scholar Back to article
Saxena, S., Pandey, J. P., Solanki, R. S., Gupta, G. K., Modi, O. P. (2015). Coupled mechanical, metallurgical and FEM based failure investigation of steam turbine blade. Engineering Failure Analysis, 52, 35–44. https://doi.org/10.1016/j.engfailanal.2015.02.012
Search in Google Scholar Back to article
Yu, M., Wang, J., Xuan, H., Xiong, W., He, Z., Qu, M. (2024). Simulation and experimental study of gas turbine blade tenon-root detachment on spin test. Aerospace, 11 (8), 629. https://doi.org/10.3390/aerospace11080629
Search in Google Scholar Back to article
Moore, J. J., Vannini, G. Camatti, M., Bianchi, P. (2010). Rotordynamic analysis of a large industrial turbocompressor including finite element substructure modeling. Journal of Engineering for Gas Turbines & Power, 132 (8), 082401. https://doi.org/10.1115/1.2938272
Search in Google Scholar Back to article
Akhtar, M., Kamran, M. S., Hayat, N., Rehman, A. U., Khan, A. A. (2021). High-vibration diagnosis of gas turbines: An experimental investigation. Journal of Vibration and Control, 27 (1–2), 3–17. https://doi.org/10.1177/1077546320923917
Search in Google Scholar Back to article
Yan, W., Zhong, S., Li, H., Chen, J., Yang, J. (2023). Turbo generator vibration source identification based on operational transfer path analysis technology. Journal of Vibroengineering, 25 (7), 1243–1256. https://doi.org/10.21595/jve.2023.23265
Search in Google Scholar Back to article
Waligórski, M., Kozak, M., Świetlicka, A. (2024). Acoustic frequency-based method for high-speed aircraft combustion analysis and hybrid artificial intelligence diagnostics. Measurement, 237, 115304. https://doi.org/10.1016/j.measurement.2024.115304
Search in Google Scholar Back to article
Szymański, G. M., Waligórski, M., Misztal W. (2024). Assessment of vibration isolation generated by the inertial forces of an aircraft combustion engine on a test bench. Diagnostyka, 25 (3). https://doi.org/10.29354/diag/188673
Search in Google Scholar Back to article
Kvasnikov, V., Stakhova, A. (2022). Vibration measurement technologies and systems. In Safety in Aviation and Space Technologies. Springer, 53–62. https://doi.org/10.1007/978-3-030-85057-9_5
Search in Google Scholar Back to article
Brüel & Kjær. HBK website. https://www.bksv.com/
Search in Google Scholar Back to article
Audrain, P., Masson, P., Berry, A., Pascal, J.-C., Gazengel, B. (2004). The use of PVDF strain sensing in active control of structural intensity in beams. Journal of Intelligent Material Systems and Structures, 15 (5), 319–327. https://doi.org/10.1177/1045389X04039936
Search in Google Scholar Back to article
Kim, K., Zhang, S., Salazar, G., Jiang, X. (2012). Design, fabrication and characterization of high temperature piezoelectric vibration sensor using YCOB crystals. Sensors and Actuators A: Physical, 178, 40–48. https://doi.org/10.1016/j.sna.2012.02.003
Search in Google Scholar Back to article
Shirinov, A. V., Schomburg, W. K. (2008). Pressure sensor from a PVDF film. Sensors & Actuators A Physical, 142 (1), 48–55. https://doi.org/10.1016/j.sna.2007.04.002
Search in Google Scholar Back to article
Yu, K.-H., Kwon, T.-G., Yun, M.-J., Lee, S.-C. (2002). Distributed flexible tactile sensor using piezoelectric film. IFAC Proceedings Volumes, 35 (1), 521–526. https://doi.org/10.3182/20020721-6-ES-1901.00899
Search in Google Scholar Back to article
Han, J., Wan, Z., Cheng, L., Liao, X., He, L. (2014). The coupling structure modal analysis of PVDF piezoelectric wafer oscillator. In 2013 Third International Conference on Instrumentation, Measurement, Computer, Communication and Control. IEEE. https://doi.org/10.1109/IMCCC.2013.278
Search in Google Scholar Back to article
Lin, S., Huang, X., Bu, Z., Yu, L., Dai, T., Lin, Z., Wang, L. (2019). Pressure sensor based on polyvinylidene fluoride nanofibers directly written upon silicon substrate. ECS Journal of Solid State Science and Technology, 8, N93. https://doi.org/10.1149/2.0061906jss
Search in Google Scholar Back to article
Wan, Z., Ji, T., Shang, Y. Y. (2011). PVDF piezoelectric film accelerometer for low frequency and ultra-low frequency. Applied Mechanics & Materials, 63–64, 465–469. https://doi.org/10.4028/www.scientific.net/amm.63-64.465
Search in Google Scholar Back to article
Zhao, S., Fu, H., Ma, K., Ma, J. (2018). A novel sensor for vibration frequency measurement with piezoelectric kinetic energy harvesting. IEEE Sensors Journal, 18 (22), 9286-9296. https://doi.org/10.1109/JSEN.2018.2856082
Search in Google Scholar Back to article
Wang, G., Li, Y., Cui, H., Yang, X., Yang, C., Chen, N. (2021). Acceleration self-compensation mechanism and experimental research on shock wave piezoelectric pressure sensor. Mechanical Systems and Signal Processing, 150, 107303. https://doi.org/10.1016/j.ymssp.2020.107303
Search in Google Scholar Back to article
Ai, C., Zhao, X., Wen, D. (2020). Characteristics research of a high sensitivity piezoelectric MOSFET acceleration sensor. Sensors, 20 (17), 4988. https://doi.org/10.3390/s20174988
Search in Google Scholar Back to article
Lee, M.-K., Han, S.-H., Park, K.-H., Park, J.-J., Kim, W.-W., Hwang, W.-J., Lee, G.-J. (2019). Design optimization of bulk piezoelectric acceleration sensor for enhanced performance. Sensors, 19 (15), 3360. https://doi.org/10.3390/s19153360
Search in Google Scholar Back to article
Pan, L., Chortos, A., Yu, G., Wang, Y., Isaacson, S., Allen, R., Shi, Y., Dauskardt, R., Bao, Z. (2014). An ultra-sensitive resistive pressure sensor based on hollow-sphere microstructure induced elasticity in conducting polymer film. Nature Communications, 5, 3002. https://doi.org/10.1038/ncomms4002
Search in Google Scholar Back to article
Chen, S., Song, Y., Xu, F. (2018). Flexible and highly sensitive resistive pressure sensor based on carbonized crepe paper with corrugated structure. ACS Applied Materials & Interfaces, 10 (40), 34646–34654. https://doi.org/10.1021/acsami.8b13535
Search in Google Scholar Back to article
Na, H. R., Lee, H. J., Jeon, J. H., Kim, H. J., Jerng, S.-K., Roy, S. B., Chun, S.-H., Lee, S., Yun, Y. J. (2022). Vertical graphene on flexible substrate, overcoming limits of crack-based resistive strain sensors. npj Flexible Electronics, 6, 2. https://doi.org/10.1038/s41528-022-00135-1
Search in Google Scholar Back to article
Iqra, M., Anwar, F., Jan, R., Mohammad, M. A. (2022). A flexible piezoresistive strain sensor based on laser scribed graphene oxide on polydimethylsiloxane. Scientific Reports, 12, 4882. https://doi.org/10.1038/s41598-022-08801-0
Search in Google Scholar Back to article
Nakamura, A., Hamanishi, T., Kawakami, S., Takeda, M. (2017). A piezo-resistive graphene strain sensor with a hollow cylindrical geometry. Materials Science and Engineering: B, 219, 20–27. https://doi.org/10.1016/j.mseb.2017.02.012
Search in Google Scholar Back to article
Wei, Y., Chen, S., Dong, X., Lin, Y., Liu, L. (2017). Flexible piezoresistive sensors based on “dynamic bridging effect” of silver nanowires toward graphene. Carbon, 113, 395–403. https://doi.org/10.1016/j.carbon.2016.11.027
Search in Google Scholar Back to article
Pan, H., Wang, Z., Wei, Z., Zhang, J., Xu, M., Zong, C., Cao, L., Wang, Q. (2017). Sandwiched-resistive sensors based on the 3D printing of TPU/CNTs–ILs. Journal of Materials Science, 57, 9187–9201. https://doi.org/10.1007/s10853-022-07226-4
Search in Google Scholar Back to article
Feng, Z., Yufeng, Z. (2020). Research progress of mechanical vibration sensors. In 2020 3rd World Conference on Mechanical Engineering and Intelligent Manufacturing (WCMEIM). IEEE. https://doi.org/10.1109/WCMEIM52463.2020.00093
Search in Google Scholar Back to article
Chen, W., Li, X., Liu, X., Yin, L. (2015). Study of self-calibrating MEMS accelerometers. AIP Advances, 5, 041326. https://doi.org/10.1063/1.4913620
Search in Google Scholar Back to article
Zhou, X., Che, L., Liang, S., Lin, Y., Li, X., Wang, Y. (2015). Design and fabrication of a MEMS capacitive accelerometer with fully symmetrical double-sided H-shaped beam structure. Microelectronic Engineering, 131, 51–57. https://doi.org/10.1016/j.mee.2014.10.005
Search in Google Scholar Back to article
Tahmasebipour, M., Vafaie, A. (2020). A novel single axis capacitive MEMS accelerometer with double-sided suspension beams fabricated using μWEDM. Sensors and Actuators A: Physical, 309, 112003. https://doi.org/10.1016/j.sna.2020.112003
Search in Google Scholar Back to article
Meijerink, M. G. H., Nieuwkoop, E., Veninga, E. P., Meuwissen, M. H. H., Tijdink, M. W. W. J. (2005). Capacitive pressure sensor in post-processing on LTCC substrates. Sensors & Actuators A: Physical, 123–124, 234–239. https://doi.org/10.1016/j.sna.2005.04.026
Search in Google Scholar Back to article
Zhang, C., Zhang, S.-Y., Wang, L.-F. (2021). A sawtooth MEMS capacitive strain sensor for passive telemetry in bearings. IEEE Sensors Journal, 21 (20), 22527–22535. https://doi.org/10.1109/JSEN.2021.3107441
Search in Google Scholar Back to article
Bakhoum, E. G., Cheng, M. H. M., Kyle, R. A. (2018). 3-axis, ultrahigh-sensitivity, miniature acceleration sensor. IEEE Transactions on Components, Packaging, and Manufacturing Technology, 8 (2), 244–250. https://doi.org/10.1109/TCPMT.2017.2773499
Search in Google Scholar Back to article
Utz, A., Walk, C., Stanitzki, A., Mokhtari, M., Kraft, M., Kokozinski, R. (2018). A high-precision and high-bandwidth MEMS-based capacitive accelerometer. IEEE Sensors Journal, 18 (16), 6533–6539. https://doi.org/10.1109/JSEN.2018.2849873
Search in Google Scholar Back to article
Langfelder, G., Longoni, A. F., Tocchio, A., Lasalandra, E. (2011). MEMS motion sensors based on the variations of the fringe capacitances. IEEE Sensors Journal, 11 (4), 1069–1077. https://doi.org/10.1109/JSEN.2010.2078499
Search in Google Scholar Back to article
Kumar, M., Mukherjee, B., Swamy, K. B. M. M., Sen, S. (2018). A novel design for enhancing the sensitivity of a capacitive MEMS device. Journal of Microelectromechanical Systems, 27 (4), 656–666. https://doi.org/10.1109/JMEMS.2018.2842429
Search in Google Scholar Back to article
Maspero, F., Delachanal, S., Berthelot, A., Joet, L., Langfelder, G., Hentz, S. (2020). Quarter-mm2 high dynamic range silicon capacitive accelerometer with a 3D process. IEEE Sensors Journal, 20 (2), 689–699. https://doi.org/10.1109/JSEN.2019.2942797
Search in Google Scholar Back to article
Jeong, Y., Serrano, D. E., Ayazi, F. (2017). Low-pressure wafer-level-packaged capacitive accelerometers with high dynamic range and wide bandwidth using nano-gap sloped electrode design. Journal of Microelectromechanical Systems, 26 (6), 1335–1344. https://doi.org/10.1109/JMEMS.2017.2744260
Search in Google Scholar Back to article
Lu, S., Zhao, Z., Yao, M. (2020). Calibration and uncertainty analysis of optical fiber Bragg grating vibration sensor. Mechanical Science and Technology for Aerospace Engineering, 39 (11), 1753–1758. https://doi.org/10.13433/j.cnki.1003-8728.20190295
Search in Google Scholar Back to article
Zhou, W., Dong, X., Jin, Y., Zhao, C. (2009). Cantilever-based FBG sensor for temperature-independent acceleration measurement. In 2009 Asia Communications and Photonics conference and Exhibition (ACP). IEEE. https://ieeexplore.ieee.org/document/5377019
Search in Google Scholar Back to article
Davies, E., George, D. S., Gower, M. C., Holmes, A. S. (2014). MEMS Fabry-Pérot optical accelerometer employing mechanical amplification via a V-beam structure. Sensors & Actuators A: Physical, 215, 22–29. https://doi.org/10.1016/j.sna.2013.08.002
Search in Google Scholar Back to article
Basumallick, N., Chatterjee, I., Biswas, P., Dasgupta, K., Bandyopadhyay, S. (2012). Fiber Bragg grating accelerometer with enhanced sensitivity. Sensors & Actuators A: Physical, 173 (1), 108–115. https://doi.org/10.1016/j.sna.2011.10.026
Search in Google Scholar Back to article
Wang D.-H., Jia P.-G. (2013). Fiber optic extrinsic Fabry-Perot accelerometer using laser emission frequency modulated phase generated carrier demodulation scheme. Optical Engineering, 52 (5), 055004. https://doi.org/10.1117/1.OE.52.5.055004
Search in Google Scholar Back to article
Wang, P., Semenova, Y., Sun, A., Wu, Q., Farrell, G. (2010). A macrobending fiber based vibration sensor using Whispering Gallery mode. In Optical Sensing and Detection. SPIE 7726, 772623. https://doi.org/10.1117/12.854638
Search in Google Scholar Back to article
Zhang, T., Zhao, Y., Wei, D., Pan, J. (2014). Fiber-optic Michelson accelerometer based on frequency modulation. IEEE Photonics Technology Letters, 26 (23), 2361–2364. https://doi.org/10.1109/LPT.2014.2355256
Search in Google Scholar Back to article
Yin, J., Liu, T., Jiang, J., Liu, K., Wang, S., Qin, Z. (2014). Batch-producible fiber-optic Fabry-Pérot sensor for simultaneous pressure and temperature sensing. IEEE Photonics Technology Letters, 26 (20), 2070–2073. https://doi.org/10.1109/LPT.2014.2347055
Search in Google Scholar Back to article
Ren, Q., Jia, P., An, G., Liu, J., Fang, G., Liu, W., Xiong, J. (2021). Dual-wavelength demodulation technique for interrogating a shortest cavity in multi-cavity fiber-optic Fabry-Pérot sensors. Optics Express, 29 (20), 32658–32669. https://doi.org/10.1364/OE.438258
Search in Google Scholar Back to article
Li, J., Jia, P., Fang, G., Wang, J., Qian, J., Ren, Q., Xiong, J. (2022). Batch-producible all-silica fiber-optic Fabry-Perot pressure sensor for high-temperature applications up to 800 °C. Sensors and Actuators A: Physical, 334, 113363. https://doi.org/10.1016/j.sna.2022.113363
Search in Google Scholar Back to article
Guo, Y., Zhang, D., Meng, H., Wen, X., Zhou, Z. (2012). Metal packaged fiber Bragg grating accelerometer. In OFS2012 22nd International Conference on Optical Fiber Sensors. SPIE 8421, 84213V. https://doi.org/10.1117/12.966835
Search in Google Scholar Back to article
Stefani, A., Andresen, S., Yuan, W., Herholdt-Rasmussen, N., Bang, O. (2012). High sensitivity polymer optical Fiber-Bragg-Grating-Based accelerometer. IEEE Photonics Technology Letters, 24 (9), 763–765. https://doi.org/10.1109/LPT.2012.2188024
Search in Google Scholar Back to article
Fender, A., MacPherson, W. N., Maier, R. R. J., Barton, J. S., George, D. S., Howden, R. I. (2008). Two-axis temperature-insensitive accelerometer based on multicore fiber Bragg gratings. IEEE Sensors Journal, 8 (7), 1292–1298. https://doi.org/10.1109/JSEN.2008.926878
Search in Google Scholar Back to article
Zhang, X., Rong, Q., Sun, H., Yang, S., Yuan, L., Hu, M. (2014). Low-frequency fiber Bragg grating accelerometer based on a double-semicircle cantilever. Optical Fiber Technology, 20 (3), 190–193. https://doi.org/10.1016/j.yofte.2014.01.006
Search in Google Scholar Back to article
Song, H., Wang, Q., Liu, M., Cai, Q. (2020). A novel fiber Bragg grating vibration sensor based on orthogonal flexure hinge structure. IEEE Sensors Journal, 20 (10), 5277–5285. https://doi.org/10.1109/JSEN.2020.2969559
Search in Google Scholar Back to article
Li, K., Chan, T. H. T., Yau, M. H., Thambiratnam, D. P., Tam, H. Y. (2014). Biaxial fiber Bragg grating accelerometer using axial and transverse forces. IEEE Photonics Technology Letters, 26 (15), 1549–1552. https://doi.org/10.1109/LPT.2014.2329009
Search in Google Scholar Back to article
Weng, Y., Qiao, X., Guo, T., Hu, M., Feng, Z., Wang, R. (2012). A robust and compact fiber Bragg grating vibration sensor for seismic measurement. IEEE Sensors Journal, 12 (4), 800–804. https://doi.org/10.1109/JSEN.2011.2166258
Search in Google Scholar Back to article
Li, T., Tan, Y., Zhou, Z., Wei, Q. (2015). Pasted type distributed two-dimensional fiber Bragg grating vibration sensor. Review of Scientific Instruments, 86, 075009. https://doi.org/10.1063/1.4927456
Search in Google Scholar Back to article
Morikawa, S. R. K., Ribeiro, A. S., Regazzi, R. D., Valente, L. C. G., Braga, A. M. B. (2002). Triaxial Bragg grating accelerometer. In 2002 15th Optical Fiber Sensors Conference Technical Digest (OFS 2002). IEEE. https://doi.org/10.1109/OFS.2002.1000510
Search in Google Scholar Back to article
Nan, Q., Song, L. (2014). Research on 3D FBG accelerometer and demodulation method. Chinese Optics Letters, 12, S12302. http://dx.doi.org/10.3788/col201412.s12302
Search in Google Scholar Back to article
Xiong, L., Guo, Y., Zhou, W., Chen, M., Zhou X. (2021). Fiber Bragg grating-based three-axis vibration sensor. IEEE Sensors Journal, 21 (22), 25749–25757. https://doi.org/10.1109/JSEN.2021.3118360
Search in Google Scholar Back to article
Le, H.-D., Hsu, H.-C., Weng, Y.-Q., Nguyen, C.-N., Chiang, C.-C. (2022). Design a fiber Bragg grating accelerometer-based using a cantilever beam structure. In 2022 International Conference on Control, Robotics and Informatics (ICCRI). IEEE, 43–47. https://doi.org/10.1109/ICCRI55461.2022.00014
Search in Google Scholar Back to article
Parida, O. P., Thomas, J., Nayak, J., Asokan, S. (2019). Double-L cantilever based fiber Bragg grating accelerometer. IEEE Sensors Journal, 19 (23), 11247–11254. https://doi.org/10.1109/JSEN.2019.2936463
Search in Google Scholar Back to article
Villarroel, A., Zurita, G., Velarde, R. (2019). Development of a low-cost vibration measurement system for industrial applications. Machines, 7 (1), 12. https://doi.org/10.3390/machines7010012
Search in Google Scholar Back to article
Yan, R., Li, X., Chen, Z., Xu, Q., Chen, X. (2016). Improving calibration accuracy of a vibration sensor through a closed loop measurement system. IEEE Instrumentation & Measurement Magazine, 19 (1), 42–46. https://doi.org/10.1109/MIM.2016.7384960
Search in Google Scholar Back to article
Cheng, R., Liu, Z., Zhai, G., Lv, Q., Yang, M., Cai, C. (2022). High-acceleration vibration calibration system based on phase-locked resonance control. Sensors, 22 (19), 7208. https://doi.org/10.3390/s22197208
Search in Google Scholar Back to article
Ferreira, C. D., Ripper, G. P., Dias, R. S., Teixeira, D. B. (2015). Primary calibration system for vibration transducers from 0.4 Hz to 160 Hz. Journal of Physics: Conference Series, 575, 012003. https://doi.org/10.1088/1742-6596/575/1/012003
Search in Google Scholar Back to article
He, W., Wang, Z., Mei, Y., Shen, R. (2013). A novel vibration-level-adjustment strategy for ultralow-frequency vibration calibration based on frequency-shifted method. Measurement Science and Technology, 24, 025007. https://doi.org/10.1088/0957-0233/24/2/025007
Search in Google Scholar Back to article
Prato, A., Mazzoleni, F., Schiavi, A. (2020). Evaluation and correction of systematic effects in a simultaneous 3-axis vibration calibration system. Acta IMEKO, 9 (5). https://doi.org/10.21014/acta_imeko.v9i5.1007
Search in Google Scholar Back to article
Payne, B., Allen, R., Hood, C. (2017). Improvements in accelerometer calibration at NIST using digital vibrometry. In Proceedings of the 87th Shock and Vibration Symposium. https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=922755
Search in Google Scholar Back to article
Kokuyama, W., Shimoda, T., Nozato, H. (2021). An automated multi-point primary vibration calibration system. Measurement: Sensors, 18, 100140. https://doi.org/10.1016/j.measen.2021.100140
Search in Google Scholar Back to article
Liu, Z., Cai, C., Lv, Q., Yang, M. (2021). Improved control of linear motors for broadband transducer calibration. IEEE Transactions on Instrumentation and Measurement, 70, 1004910. https://doi.org/10.1109/TIM.2021.3057329
Search in Google Scholar Back to article
Ohm, W.-S., Wu, L., Hanes, P., Wong, G. S. K. (2006). Generation of low-frequency vibration using a cantilever beam for calibration of accelerometers. Journal of Sound & Vibration, 289 (1–2), 192–209. https://doi.org/10.1016/j.jsv.2005.02.002
Search in Google Scholar Back to article
Garg, N., Sharma, O., Kumar, A., Schiefer, M. I. (2012). A novel approach for realization of primary vibration calibration standard by homodyne laser interferometer in frequency range of 0.1 Hz to 20 kHz. Measurement, 45 (8), 1941–1950. https://doi.org/10.1016/j.measurement.2012.04.011
Search in Google Scholar Back to article
Garg, N., Chauhan, B. S. (2020). Measurement uncertainty in vibration calibration in frequency range of 5 Hz to 10 kHz. MAPAN, 35, 397–405. https://doi.org/10.1007/s12647-020-00385-2
Search in Google Scholar Back to article
Van Kann, F., Winterflood, J. (2005). Simple method for absolute calibration of geophones, seismometers, and other inertial vibration sensors. Review of Scientific Instruments, 76, 034501. https://doi.org/10.1063/1.1867432
Search in Google Scholar Back to article
Cheng, H., Wang, Y., Wei, K., Liu, Z., Yang, M., Cai, C. (2022). Visual encoder-based angle measurement method in low-frequency angular vibrationcalibration. Applied Optics, 61 (26), 7662–7670. https://doi.org/10.1364/AO.467990
Search in Google Scholar Back to article
Link, A., Gerhardt, J., von Martens, H.-J. (1996). Amplitude and phase calibration of accelerometers in the nanometer range. In Second International Conference on Vibration Measurements by Laser Techniques: Advances and Applications. SPIE 2868, 37–48. https://doi.org/10.1117/12.248669
Search in Google Scholar Back to article
Shimoda, T., Kokuyama, W., Nozato, H. (2022). Precise sinusoidal signal extraction from noisy waveform in vibration calibration. Metrologia, 59 035010. https://doi.org/10.1088/1681-7575/ac6cba
Search in Google Scholar Back to article
Kumar, D., Chiang, C.-H., Lin, Y.-C. (2022). Experimental vibration analysis of large structures using 3D DIC technique with a novel calibration method. Journal of Civil Structural Health Monitoring, 12, 391–409. https://doi.org/10.1007/s13349-022-00549-5
Search in Google Scholar Back to article
Ripper, G. P., Ferreira, C. D., Dias, R. S., Micheli, G. B. (2020). Reduction of gravity effect on the results of low-frequency accelerometer calibration. Acta IMEKO, 9 (5). https://doi.org/10.21014/acta_imeko.v9i5.1002
Search in Google Scholar Back to article
Cai, Q., Song, N., Yang, G., Liu, Y. (2013). Accelerometer calibration with nonlinear scale factor based on multi-position observation. Measurement Science and Technology, 24 (10), 105002. https://doi.org/10.1088/0957-0233/24/10/105002
Search in Google Scholar Back to article
Won, S. P., Golnaraghi, F. (2010). A triaxial accelerometer calibration method using a mathematical model. IEEE Transactions on Instrumentation and Measurement, 59 (8), 2144–2153. https://doi.org/10.1109/TIM.2009.2031849
Search in Google Scholar Back to article
Gietzelt, M., Wolf, K.-H., Marschollek, M., Haux, R. (2013). Performance comparison of accelerometer calibration algorithms based on 3D-ellipsoid fitting methods. Computer Methods and Programs in Biomedicine, 111 (1), 62–71. https://doi.org/10.1016/j.cmpb.2013.03.006
Search in Google Scholar Back to article
Sipos, M., Paces, P., Rohac, J., Novacek, P. (2012). Analyses of triaxial accelerometer calibration algorithms. IEEE Sensors Journal, 12 (5), 1157–1165. https://doi.org/10.1109/JSEN.2011.2167319
Search in Google Scholar Back to article
Beravs, T., Podobnik, J., Munih, M. (2012). Three-axial accelerometer calibration using Kalman filter covariance matrix for online estimation of optimal sensor orientation. IEEE Transactions on Instrumentation and Measurement, 61 (9), 2501–2511. https://doi.org/10.1109/TIM.2012.2187360
Search in Google Scholar Back to article
Gao, P., Li, K., Wang, L., Liu, Z. (2017). A self-calibration method for accelerometer nonlinearity errors in triaxis rotational inertial navigation system. IEEE Transactions on Instrumentation and Measurement, 66 (2), 243–253. https://doi.org/10.1109/TIM.2016.2625958
Search in Google Scholar Back to article
Olsson, F., Kok, M., Halvorsen, K., Schön, T. (2016). Accelerometer calibration using sensor fusion with a gyroscope. In 2016 IEEE Statistical Signal Processing Workshop (SSP). IEEE. https://doi.org/10.1109/SSP.2016.7551836
Search in Google Scholar Back to article
Särkkä, O., Nieminen, T., Suuriniemi, S., Kettunen, L. (2017). A multi-position calibration method for consumer-grade accelerometers, gyroscopes, and magnetometers to field conditions. IEEE Sensors Journal, 17 (11), 3470–3481. https://doi.org/10.1109/JSEN.2017.2694488
Search in Google Scholar Back to article
Manzaneque, T., Steeneken, P. G., Alijani, F., Ghatkesar, M. K. (2020). Method to determine the closed-loop precision of resonant sensors from open-loop measurements. IEEE Sensors Journal, 20 (23), 14262–14272. https://doi.org/10.1109/JSEN.2020.3008557
Search in Google Scholar Back to article
Wang, X., Mou, J., Miao, L., Huang, T., Che, S. (2021). A comparison angular vibration calibration approach based on the IFOG. MAPAN, 36, 607–613. https://doi.org/10.1007/s12647-021-00464-y
Search in Google Scholar Back to article
Shimoda, T., Kokuyama, W., Nozato, H. (2021). Noise reduction of calibration system for micro-vibration measurement. Measurement: Sensors, 18, 100138. https://doi.org/10.1016/j.measen.2021.100138
Search in Google Scholar Back to article
Gou, L., Peng, D., Chen, X., Wu, L., Tang, Q. (2019). A self-calibration method for angular displacement sensor working in harsh environments. IEEE Sensors Journal, 19 (8), 3033–3040. https://doi.org/10.1109/JSEN.2018.2879099
Search in Google Scholar Back to article
Tez, S., Aykutlu, U., Torunbalci, M. M., Akin, T. (2015). A bulk-micromachined three-axis capacitive MEMS accelerometer on a single die. Journal of Microelectromechanical Systems, 24 (5), 1264–1274. https://doi.org/10.1109/JMEMS.2015.2451079
Search in Google Scholar Back to article
Xu, H., Li, F., Gao, Y., Wang, W. (2020). Simultaneous measurement of tilt and acceleration based on FBG sensor. IEEE Sensors Journal, 20 (24), 14857–14864. https://doi.org/10.1109/JSEN.2020.3010851
Search in Google Scholar Back to article