Fig. 1.

Fig. 2.

Fig. 3.

Fig. 4.

Fig. 5.

Fig. 6.

Fig. 7.

Fig. 8.

Summaries of some typical research work on acceleration sensors with detail information_
| Type | Sensitivity | Frequency range | Temperature | Range | Relative error | Nonlinearity | Response time | Refs |
|---|---|---|---|---|---|---|---|---|
| Piezoelectric | 5.9 pC/g | < 350 Hz | 1000 °C | [24] | ||||
| Piezoelectric | 0.001 Hz to 2 GHz | 120 °C | several ns | [25] | ||||
| Piezoelectric | 80 to 130 Hz | 0.041 % | [30] | |||||
| Piezoelectric | 1000 pC/MPa | > 200 kHz | −20–180 °C | < 0.5 % (linear error) | [31] | |||
| Resistance | 10–100 °C | [34] | ||||||
| Resistance | 2.56–5.67/kPa | < 30 ms | [35] | |||||
| Capacitive | 0.24 V/g | 0.29 % | [43] | |||||
| Capacitive | 18 mV/g | 100 g | 3 % | [44] | ||||
| Capacitive | ±160 g | 1 % | [51] | |||||
| Capacitive | ±4 g | 1 % | [49] | |||||
| Capacitive | 0–80 °C | ±10 g for x, y +12/−7.5 g for z | 0.34 %, 0.28 %, 0.41 % | [106] | ||||
| Fiber | 450 pm/g | [56] | ||||||
| Fiber | 19 pm/g | 1 kHz | 0.1–15 g | [64] | ||||
| Fiber | 1296 pm/g | 0 to 25 Hz | 20–115 °C | 0.5 to 5.5 g | 2 % | [66] | ||
| Fiber | 41.2/34.5 pm/g | 20 to 800 Hz | [67] | |||||
| Fiber | 2430 pm/g | 0 to 20 Hz | [107] | |||||
| Fiber | 19 pm/g | 10 to 1000 Hz | [65] |
The accuracy of the calibration methods in the previous literature_
| Description | Accuracy | Refs |
|---|---|---|
| 10 % cost of reference (DAQ NI 9775) | Vibration measurement system was working adequately | [76] |
| A closed loop calibration system | U1, U2, and S2 do not need to be measured again; the standard deviation of sensitivity is 0.0003 mV/ms−2 | [77] |
| A phase-locked resonance tracking control method based on the phase resonance principle | Acceleration stability control index of less than 0.5 % and a resonance tracking time of less than 0.1 s | [78] |
| Rapid vibration-level-adjustment for ultralow-frequency vibration exciters | Requires less vibration-level-adjustment time and improves the adjustment efficiency | [80] |
| Improved control of the linear motor | Maintaining amplitude stability over the frequency range from 0.1 to 160 Hz; the standard deviation is less than 0.01 mV/ms−2 | [84] |
| A simple but powerful method is presented | Accurate absolute calibrations with an error of 0.1 % | [88] |
| Introducing the accelerometer nonlinear scale factor | Calibration methods outperform the traditional calibration methods without high-precision orientation control | [94] |
| A low-frequency vibration generator that overcome small acceleration amplitudes and a high level of total harmonic distortion | Relative expanded uncertainty is 2.6 % at a confidence level of 95 % | [85] |