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Recent Advances on Vibration Sensors and Calibration Methods for the Operation and Maintenance of Mechanical Equipment Cover

Recent Advances on Vibration Sensors and Calibration Methods for the Operation and Maintenance of Mechanical Equipment

By: Xin Su,  Jiewei Liu,  Jiaen Xu and  Peng Chen  
Open Access
|Jun 2025

References

  1. The Editors of Encyclopaedia Britannica. (2025). vibration. In Encyclopedia Britannica. https://www.britannica.com/science/vibration
  2. Hao, G., Yang, Y., Yu, H., Tan, Y., Hu, E., Zhang, M. (2023). A mechanical vibration fault diagnosis method of generator circuit breaker based on deep residual network. In 2023 IEEE 4th International Conference on Electrical Materials and Power Equipment (ICEMPE). IEEE. https://doi.org/10.1109/ICEMPE57831.2023.10139395
  3. Li, W., Zou, W., Fu, J., Gao, F., Yu, M. (2023). Development of an anti-vibration aircraft model support system with magnetorheological annular squeeze dampers for wind tunnel. In Mechanical Systems and Signal Processing, 202, 110663. https://doi.org/10.1016/j.ymssp.2023.110663
  4. International Organization for Standardization (ISO). (2010). Mechanical vibration and shock — Vibration of fixed structures — Guidelines for the measurement of vibrations and evaluation of then-effects on structures. ISO 4866:2010. https://www.iso.org/standard/38967.html
  5. Yılmaz, A. M., Boyacı, A., Ekti, A. R., Yarkan, S. (2024). An experimental setup for mechanical vibration analysis using VLC. In 2024 32nd Signal Processing and Communications Applications Conference (SIU). IEEE. https://doi.org/10.1109/SIU61531.2024.10600982
  6. Doshi, S., Katoch, A., Suresh, A., Razak, F. A., Datta, S., Madhavan, S., Zanhar, C. M., Gundabattini, E. (2021). A review on vibrations in various turbomachines such as fans, compressors, turbines and pumps. Journal of Vibration Engineering & Technologies, 9 (7), 1557–1575. https://doi.org/10.1007/s42417-021-00313-x
  7. Zhao, M., Shen, X., Jiang, F. (2023). Research on mechanical vibration measurement method based on event camera. In 2023 3rd International Conference on Energy Engineering and Power Systems (EEPS). IEEE, 528–532. https://doi.org/10.1109/EEPS58791.2023.10257083
  8. Sun, L., Ma, Y., Xie, T., Kang, H., Li, Z., He, R. (2023). A review of hydraulic and mechanical vibration characteristics of pumped storage units. In 2023 6th International Conference on Power and Energy Applications (ICPEA). IEEE, 50–58. https://doi.org/10.1109/ICPEA59834.2023.10398696
  9. Misra, A., Jayachandran, S., Kenche, S., Katoch, A., Suresh, A., Gundabattini, E., Selvaraj, S. K., Legesse, A. A. (2022). A review on vertical take-off and landing (VTOL) tilt-rotor and tilt wing unmanned aerial vehicles (UAVs). Journal of Engineering. https://doi.org/10.1155/2022/1803638
  10. Doshi, S., Katoch, A., Suresh, A., Razak, F. A., Datta, S., Madhavan, S., Zanhar, C. M., Gundabattini, E. (2021). A review on vibrations in various turbomachines such as fans, compressors, turbines and pumps. Journal of Vibration Engineering & Technologies, 9 (7), 1557–1575. https://doi.org/10.1007/s42417-021-00313-x
  11. Lu, J., Yuan, S., Parameswaran, S., Yuan, J., Si, Q. (2017). Investigation on the vibration and flow instabilities induced by cavitation in a centrifugal pump. Advances in Mechanical Engineering, 9 (4). https://doi.org/10.1177/1687814017696225
  12. Lu, Y., Tan, L., Zhao, X., Ma, C. (2024). Experiment on cavitation-vibration correlation of a centrifugal pump under steady state and start-up conditions in energy storage station. In Journal of Energy Storage, 83, 110763. https://doi.org/10.1016/j.est.2024.110763
  13. Fahmi, A. T. W. K., Kashyzadeh, K. R., Ghorbani, S. (2022). A comprehensive review on mechanical failures cause vibration in the gas turbine of combined cycle power plants. Engineering Failure Analysis, 134, 106094. https://doi.org/10.1016/j.engfailanal.2022.106094
  14. Sharma, C., Kumar, S., Singh, A., Hire, K. R. B., Karnatak, V., Pandey, V., Gupta, J., Shrimali, R., Singh, S., Noorsha, S. S., Gundabattini, E. (2021). Comprehensive review on leading edge turbine blade cooling technologies. International Journal of Heat & Technology, 39 (2), 403–416. https://doi.org/10.18280/ijht.390209
  15. Saxena, S., Pandey, J. P., Solanki, R. S., Gupta, G. K., Modi, O. P. (2015). Coupled mechanical, metallurgical and FEM based failure investigation of steam turbine blade. Engineering Failure Analysis, 52, 35–44. https://doi.org/10.1016/j.engfailanal.2015.02.012
  16. Yu, M., Wang, J., Xuan, H., Xiong, W., He, Z., Qu, M. (2024). Simulation and experimental study of gas turbine blade tenon-root detachment on spin test. Aerospace, 11 (8), 629. https://doi.org/10.3390/aerospace11080629
  17. Moore, J. J., Vannini, G. Camatti, M., Bianchi, P. (2010). Rotordynamic analysis of a large industrial turbocompressor including finite element substructure modeling. Journal of Engineering for Gas Turbines & Power, 132 (8), 082401. https://doi.org/10.1115/1.2938272
  18. Akhtar, M., Kamran, M. S., Hayat, N., Rehman, A. U., Khan, A. A. (2021). High-vibration diagnosis of gas turbines: An experimental investigation. Journal of Vibration and Control, 27 (1–2), 3–17. https://doi.org/10.1177/1077546320923917
  19. Yan, W., Zhong, S., Li, H., Chen, J., Yang, J. (2023). Turbo generator vibration source identification based on operational transfer path analysis technology. Journal of Vibroengineering, 25 (7), 1243–1256. https://doi.org/10.21595/jve.2023.23265
  20. Waligórski, M., Kozak, M., Świetlicka, A. (2024). Acoustic frequency-based method for high-speed aircraft combustion analysis and hybrid artificial intelligence diagnostics. Measurement, 237, 115304. https://doi.org/10.1016/j.measurement.2024.115304
  21. Szymański, G. M., Waligórski, M., Misztal W. (2024). Assessment of vibration isolation generated by the inertial forces of an aircraft combustion engine on a test bench. Diagnostyka, 25 (3). https://doi.org/10.29354/diag/188673
  22. Kvasnikov, V., Stakhova, A. (2022). Vibration measurement technologies and systems. In Safety in Aviation and Space Technologies. Springer, 53–62. https://doi.org/10.1007/978-3-030-85057-9_5
  23. Brüel & Kjær. HBK website. https://www.bksv.com/
  24. Audrain, P., Masson, P., Berry, A., Pascal, J.-C., Gazengel, B. (2004). The use of PVDF strain sensing in active control of structural intensity in beams. Journal of Intelligent Material Systems and Structures, 15 (5), 319–327. https://doi.org/10.1177/1045389X04039936
  25. Kim, K., Zhang, S., Salazar, G., Jiang, X. (2012). Design, fabrication and characterization of high temperature piezoelectric vibration sensor using YCOB crystals. Sensors and Actuators A: Physical, 178, 40–48. https://doi.org/10.1016/j.sna.2012.02.003
  26. Shirinov, A. V., Schomburg, W. K. (2008). Pressure sensor from a PVDF film. Sensors & Actuators A Physical, 142 (1), 48–55. https://doi.org/10.1016/j.sna.2007.04.002
  27. Yu, K.-H., Kwon, T.-G., Yun, M.-J., Lee, S.-C. (2002). Distributed flexible tactile sensor using piezoelectric film. IFAC Proceedings Volumes, 35 (1), 521–526. https://doi.org/10.3182/20020721-6-ES-1901.00899
  28. Han, J., Wan, Z., Cheng, L., Liao, X., He, L. (2014). The coupling structure modal analysis of PVDF piezoelectric wafer oscillator. In 2013 Third International Conference on Instrumentation, Measurement, Computer, Communication and Control. IEEE. https://doi.org/10.1109/IMCCC.2013.278
  29. Lin, S., Huang, X., Bu, Z., Yu, L., Dai, T., Lin, Z., Wang, L. (2019). Pressure sensor based on polyvinylidene fluoride nanofibers directly written upon silicon substrate. ECS Journal of Solid State Science and Technology, 8, N93. https://doi.org/10.1149/2.0061906jss
  30. Wan, Z., Ji, T., Shang, Y. Y. (2011). PVDF piezoelectric film accelerometer for low frequency and ultra-low frequency. Applied Mechanics & Materials, 63–64, 465–469. https://doi.org/10.4028/www.scientific.net/amm.63-64.465
  31. Zhao, S., Fu, H., Ma, K., Ma, J. (2018). A novel sensor for vibration frequency measurement with piezoelectric kinetic energy harvesting. IEEE Sensors Journal, 18 (22), 9286-9296. https://doi.org/10.1109/JSEN.2018.2856082
  32. Wang, G., Li, Y., Cui, H., Yang, X., Yang, C., Chen, N. (2021). Acceleration self-compensation mechanism and experimental research on shock wave piezoelectric pressure sensor. Mechanical Systems and Signal Processing, 150, 107303. https://doi.org/10.1016/j.ymssp.2020.107303
  33. Ai, C., Zhao, X., Wen, D. (2020). Characteristics research of a high sensitivity piezoelectric MOSFET acceleration sensor. Sensors, 20 (17), 4988. https://doi.org/10.3390/s20174988
  34. Lee, M.-K., Han, S.-H., Park, K.-H., Park, J.-J., Kim, W.-W., Hwang, W.-J., Lee, G.-J. (2019). Design optimization of bulk piezoelectric acceleration sensor for enhanced performance. Sensors, 19 (15), 3360. https://doi.org/10.3390/s19153360
  35. Pan, L., Chortos, A., Yu, G., Wang, Y., Isaacson, S., Allen, R., Shi, Y., Dauskardt, R., Bao, Z. (2014). An ultra-sensitive resistive pressure sensor based on hollow-sphere microstructure induced elasticity in conducting polymer film. Nature Communications, 5, 3002. https://doi.org/10.1038/ncomms4002
  36. Chen, S., Song, Y., Xu, F. (2018). Flexible and highly sensitive resistive pressure sensor based on carbonized crepe paper with corrugated structure. ACS Applied Materials & Interfaces, 10 (40), 34646–34654. https://doi.org/10.1021/acsami.8b13535
  37. Na, H. R., Lee, H. J., Jeon, J. H., Kim, H. J., Jerng, S.-K., Roy, S. B., Chun, S.-H., Lee, S., Yun, Y. J. (2022). Vertical graphene on flexible substrate, overcoming limits of crack-based resistive strain sensors. npj Flexible Electronics, 6, 2. https://doi.org/10.1038/s41528-022-00135-1
  38. Iqra, M., Anwar, F., Jan, R., Mohammad, M. A. (2022). A flexible piezoresistive strain sensor based on laser scribed graphene oxide on polydimethylsiloxane. Scientific Reports, 12, 4882. https://doi.org/10.1038/s41598-022-08801-0
  39. Nakamura, A., Hamanishi, T., Kawakami, S., Takeda, M. (2017). A piezo-resistive graphene strain sensor with a hollow cylindrical geometry. Materials Science and Engineering: B, 219, 20–27. https://doi.org/10.1016/j.mseb.2017.02.012
  40. Wei, Y., Chen, S., Dong, X., Lin, Y., Liu, L. (2017). Flexible piezoresistive sensors based on “dynamic bridging effect” of silver nanowires toward graphene. Carbon, 113, 395–403. https://doi.org/10.1016/j.carbon.2016.11.027
  41. Pan, H., Wang, Z., Wei, Z., Zhang, J., Xu, M., Zong, C., Cao, L., Wang, Q. (2017). Sandwiched-resistive sensors based on the 3D printing of TPU/CNTs–ILs. Journal of Materials Science, 57, 9187–9201. https://doi.org/10.1007/s10853-022-07226-4
  42. Feng, Z., Yufeng, Z. (2020). Research progress of mechanical vibration sensors. In 2020 3rd World Conference on Mechanical Engineering and Intelligent Manufacturing (WCMEIM). IEEE. https://doi.org/10.1109/WCMEIM52463.2020.00093
  43. Chen, W., Li, X., Liu, X., Yin, L. (2015). Study of self-calibrating MEMS accelerometers. AIP Advances, 5, 041326. https://doi.org/10.1063/1.4913620
  44. Zhou, X., Che, L., Liang, S., Lin, Y., Li, X., Wang, Y. (2015). Design and fabrication of a MEMS capacitive accelerometer with fully symmetrical double-sided H-shaped beam structure. Microelectronic Engineering, 131, 51–57. https://doi.org/10.1016/j.mee.2014.10.005
  45. Tahmasebipour, M., Vafaie, A. (2020). A novel single axis capacitive MEMS accelerometer with double-sided suspension beams fabricated using μWEDM. Sensors and Actuators A: Physical, 309, 112003. https://doi.org/10.1016/j.sna.2020.112003
  46. Meijerink, M. G. H., Nieuwkoop, E., Veninga, E. P., Meuwissen, M. H. H., Tijdink, M. W. W. J. (2005). Capacitive pressure sensor in post-processing on LTCC substrates. Sensors & Actuators A: Physical, 123–124, 234–239. https://doi.org/10.1016/j.sna.2005.04.026
  47. Zhang, C., Zhang, S.-Y., Wang, L.-F. (2021). A sawtooth MEMS capacitive strain sensor for passive telemetry in bearings. IEEE Sensors Journal, 21 (20), 22527–22535. https://doi.org/10.1109/JSEN.2021.3107441
  48. Bakhoum, E. G., Cheng, M. H. M., Kyle, R. A. (2018). 3-axis, ultrahigh-sensitivity, miniature acceleration sensor. IEEE Transactions on Components, Packaging, and Manufacturing Technology, 8 (2), 244–250. https://doi.org/10.1109/TCPMT.2017.2773499
  49. Utz, A., Walk, C., Stanitzki, A., Mokhtari, M., Kraft, M., Kokozinski, R. (2018). A high-precision and high-bandwidth MEMS-based capacitive accelerometer. IEEE Sensors Journal, 18 (16), 6533–6539. https://doi.org/10.1109/JSEN.2018.2849873
  50. Langfelder, G., Longoni, A. F., Tocchio, A., Lasalandra, E. (2011). MEMS motion sensors based on the variations of the fringe capacitances. IEEE Sensors Journal, 11 (4), 1069–1077. https://doi.org/10.1109/JSEN.2010.2078499
  51. Kumar, M., Mukherjee, B., Swamy, K. B. M. M., Sen, S. (2018). A novel design for enhancing the sensitivity of a capacitive MEMS device. Journal of Microelectromechanical Systems, 27 (4), 656–666. https://doi.org/10.1109/JMEMS.2018.2842429
  52. Maspero, F., Delachanal, S., Berthelot, A., Joet, L., Langfelder, G., Hentz, S. (2020). Quarter-mm2 high dynamic range silicon capacitive accelerometer with a 3D process. IEEE Sensors Journal, 20 (2), 689–699. https://doi.org/10.1109/JSEN.2019.2942797
  53. Jeong, Y., Serrano, D. E., Ayazi, F. (2017). Low-pressure wafer-level-packaged capacitive accelerometers with high dynamic range and wide bandwidth using nano-gap sloped electrode design. Journal of Microelectromechanical Systems, 26 (6), 1335–1344. https://doi.org/10.1109/JMEMS.2017.2744260
  54. Lu, S., Zhao, Z., Yao, M. (2020). Calibration and uncertainty analysis of optical fiber Bragg grating vibration sensor. Mechanical Science and Technology for Aerospace Engineering, 39 (11), 1753–1758. https://doi.org/10.13433/j.cnki.1003-8728.20190295
  55. Zhou, W., Dong, X., Jin, Y., Zhao, C. (2009). Cantilever-based FBG sensor for temperature-independent acceleration measurement. In 2009 Asia Communications and Photonics conference and Exhibition (ACP). IEEE. https://ieeexplore.ieee.org/document/5377019
  56. Davies, E., George, D. S., Gower, M. C., Holmes, A. S. (2014). MEMS Fabry-Pérot optical accelerometer employing mechanical amplification via a V-beam structure. Sensors & Actuators A: Physical, 215, 22–29. https://doi.org/10.1016/j.sna.2013.08.002
  57. Basumallick, N., Chatterjee, I., Biswas, P., Dasgupta, K., Bandyopadhyay, S. (2012). Fiber Bragg grating accelerometer with enhanced sensitivity. Sensors & Actuators A: Physical, 173 (1), 108–115. https://doi.org/10.1016/j.sna.2011.10.026
  58. Wang D.-H., Jia P.-G. (2013). Fiber optic extrinsic Fabry-Perot accelerometer using laser emission frequency modulated phase generated carrier demodulation scheme. Optical Engineering, 52 (5), 055004. https://doi.org/10.1117/1.OE.52.5.055004
  59. Wang, P., Semenova, Y., Sun, A., Wu, Q., Farrell, G. (2010). A macrobending fiber based vibration sensor using Whispering Gallery mode. In Optical Sensing and Detection. SPIE 7726, 772623. https://doi.org/10.1117/12.854638
  60. Zhang, T., Zhao, Y., Wei, D., Pan, J. (2014). Fiber-optic Michelson accelerometer based on frequency modulation. IEEE Photonics Technology Letters, 26 (23), 2361–2364. https://doi.org/10.1109/LPT.2014.2355256
  61. Yin, J., Liu, T., Jiang, J., Liu, K., Wang, S., Qin, Z. (2014). Batch-producible fiber-optic Fabry-Pérot sensor for simultaneous pressure and temperature sensing. IEEE Photonics Technology Letters, 26 (20), 2070–2073. https://doi.org/10.1109/LPT.2014.2347055
  62. Ren, Q., Jia, P., An, G., Liu, J., Fang, G., Liu, W., Xiong, J. (2021). Dual-wavelength demodulation technique for interrogating a shortest cavity in multi-cavity fiber-optic Fabry-Pérot sensors. Optics Express, 29 (20), 32658–32669. https://doi.org/10.1364/OE.438258
  63. Li, J., Jia, P., Fang, G., Wang, J., Qian, J., Ren, Q., Xiong, J. (2022). Batch-producible all-silica fiber-optic Fabry-Perot pressure sensor for high-temperature applications up to 800 °C. Sensors and Actuators A: Physical, 334, 113363. https://doi.org/10.1016/j.sna.2022.113363
  64. Guo, Y., Zhang, D., Meng, H., Wen, X., Zhou, Z. (2012). Metal packaged fiber Bragg grating accelerometer. In OFS2012 22nd International Conference on Optical Fiber Sensors. SPIE 8421, 84213V. https://doi.org/10.1117/12.966835
  65. Stefani, A., Andresen, S., Yuan, W., Herholdt-Rasmussen, N., Bang, O. (2012). High sensitivity polymer optical Fiber-Bragg-Grating-Based accelerometer. IEEE Photonics Technology Letters, 24 (9), 763–765. https://doi.org/10.1109/LPT.2012.2188024
  66. Fender, A., MacPherson, W. N., Maier, R. R. J., Barton, J. S., George, D. S., Howden, R. I. (2008). Two-axis temperature-insensitive accelerometer based on multicore fiber Bragg gratings. IEEE Sensors Journal, 8 (7), 1292–1298. https://doi.org/10.1109/JSEN.2008.926878
  67. Zhang, X., Rong, Q., Sun, H., Yang, S., Yuan, L., Hu, M. (2014). Low-frequency fiber Bragg grating accelerometer based on a double-semicircle cantilever. Optical Fiber Technology, 20 (3), 190–193. https://doi.org/10.1016/j.yofte.2014.01.006
  68. Song, H., Wang, Q., Liu, M., Cai, Q. (2020). A novel fiber Bragg grating vibration sensor based on orthogonal flexure hinge structure. IEEE Sensors Journal, 20 (10), 5277–5285. https://doi.org/10.1109/JSEN.2020.2969559
  69. Li, K., Chan, T. H. T., Yau, M. H., Thambiratnam, D. P., Tam, H. Y. (2014). Biaxial fiber Bragg grating accelerometer using axial and transverse forces. IEEE Photonics Technology Letters, 26 (15), 1549–1552. https://doi.org/10.1109/LPT.2014.2329009
  70. Weng, Y., Qiao, X., Guo, T., Hu, M., Feng, Z., Wang, R. (2012). A robust and compact fiber Bragg grating vibration sensor for seismic measurement. IEEE Sensors Journal, 12 (4), 800–804. https://doi.org/10.1109/JSEN.2011.2166258
  71. Li, T., Tan, Y., Zhou, Z., Wei, Q. (2015). Pasted type distributed two-dimensional fiber Bragg grating vibration sensor. Review of Scientific Instruments, 86, 075009. https://doi.org/10.1063/1.4927456
  72. Morikawa, S. R. K., Ribeiro, A. S., Regazzi, R. D., Valente, L. C. G., Braga, A. M. B. (2002). Triaxial Bragg grating accelerometer. In 2002 15th Optical Fiber Sensors Conference Technical Digest (OFS 2002). IEEE. https://doi.org/10.1109/OFS.2002.1000510
  73. Nan, Q., Song, L. (2014). Research on 3D FBG accelerometer and demodulation method. Chinese Optics Letters, 12, S12302. http://dx.doi.org/10.3788/col201412.s12302
  74. Xiong, L., Guo, Y., Zhou, W., Chen, M., Zhou X. (2021). Fiber Bragg grating-based three-axis vibration sensor. IEEE Sensors Journal, 21 (22), 25749–25757. https://doi.org/10.1109/JSEN.2021.3118360
  75. Le, H.-D., Hsu, H.-C., Weng, Y.-Q., Nguyen, C.-N., Chiang, C.-C. (2022). Design a fiber Bragg grating accelerometer-based using a cantilever beam structure. In 2022 International Conference on Control, Robotics and Informatics (ICCRI). IEEE, 43–47. https://doi.org/10.1109/ICCRI55461.2022.00014
  76. Parida, O. P., Thomas, J., Nayak, J., Asokan, S. (2019). Double-L cantilever based fiber Bragg grating accelerometer. IEEE Sensors Journal, 19 (23), 11247–11254. https://doi.org/10.1109/JSEN.2019.2936463
  77. Villarroel, A., Zurita, G., Velarde, R. (2019). Development of a low-cost vibration measurement system for industrial applications. Machines, 7 (1), 12. https://doi.org/10.3390/machines7010012
  78. Yan, R., Li, X., Chen, Z., Xu, Q., Chen, X. (2016). Improving calibration accuracy of a vibration sensor through a closed loop measurement system. IEEE Instrumentation & Measurement Magazine, 19 (1), 42–46. https://doi.org/10.1109/MIM.2016.7384960
  79. Cheng, R., Liu, Z., Zhai, G., Lv, Q., Yang, M., Cai, C. (2022). High-acceleration vibration calibration system based on phase-locked resonance control. Sensors, 22 (19), 7208. https://doi.org/10.3390/s22197208
  80. Ferreira, C. D., Ripper, G. P., Dias, R. S., Teixeira, D. B. (2015). Primary calibration system for vibration transducers from 0.4 Hz to 160 Hz. Journal of Physics: Conference Series, 575, 012003. https://doi.org/10.1088/1742-6596/575/1/012003
  81. He, W., Wang, Z., Mei, Y., Shen, R. (2013). A novel vibration-level-adjustment strategy for ultralow-frequency vibration calibration based on frequency-shifted method. Measurement Science and Technology, 24, 025007. https://doi.org/10.1088/0957-0233/24/2/025007
  82. Prato, A., Mazzoleni, F., Schiavi, A. (2020). Evaluation and correction of systematic effects in a simultaneous 3-axis vibration calibration system. Acta IMEKO, 9 (5). https://doi.org/10.21014/acta_imeko.v9i5.1007
  83. Payne, B., Allen, R., Hood, C. (2017). Improvements in accelerometer calibration at NIST using digital vibrometry. In Proceedings of the 87th Shock and Vibration Symposium. https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=922755
  84. Kokuyama, W., Shimoda, T., Nozato, H. (2021). An automated multi-point primary vibration calibration system. Measurement: Sensors, 18, 100140. https://doi.org/10.1016/j.measen.2021.100140
  85. Liu, Z., Cai, C., Lv, Q., Yang, M. (2021). Improved control of linear motors for broadband transducer calibration. IEEE Transactions on Instrumentation and Measurement, 70, 1004910. https://doi.org/10.1109/TIM.2021.3057329
  86. Ohm, W.-S., Wu, L., Hanes, P., Wong, G. S. K. (2006). Generation of low-frequency vibration using a cantilever beam for calibration of accelerometers. Journal of Sound & Vibration, 289 (1–2), 192–209. https://doi.org/10.1016/j.jsv.2005.02.002
  87. Garg, N., Sharma, O., Kumar, A., Schiefer, M. I. (2012). A novel approach for realization of primary vibration calibration standard by homodyne laser interferometer in frequency range of 0.1 Hz to 20 kHz. Measurement, 45 (8), 1941–1950. https://doi.org/10.1016/j.measurement.2012.04.011
  88. Garg, N., Chauhan, B. S. (2020). Measurement uncertainty in vibration calibration in frequency range of 5 Hz to 10 kHz. MAPAN, 35, 397–405. https://doi.org/10.1007/s12647-020-00385-2
  89. Van Kann, F., Winterflood, J. (2005). Simple method for absolute calibration of geophones, seismometers, and other inertial vibration sensors. Review of Scientific Instruments, 76, 034501. https://doi.org/10.1063/1.1867432
  90. Cheng, H., Wang, Y., Wei, K., Liu, Z., Yang, M., Cai, C. (2022). Visual encoder-based angle measurement method in low-frequency angular vibrationcalibration. Applied Optics, 61 (26), 7662–7670. https://doi.org/10.1364/AO.467990
  91. Link, A., Gerhardt, J., von Martens, H.-J. (1996). Amplitude and phase calibration of accelerometers in the nanometer range. In Second International Conference on Vibration Measurements by Laser Techniques: Advances and Applications. SPIE 2868, 37–48. https://doi.org/10.1117/12.248669
  92. Shimoda, T., Kokuyama, W., Nozato, H. (2022). Precise sinusoidal signal extraction from noisy waveform in vibration calibration. Metrologia, 59 035010. https://doi.org/10.1088/1681-7575/ac6cba
  93. Kumar, D., Chiang, C.-H., Lin, Y.-C. (2022). Experimental vibration analysis of large structures using 3D DIC technique with a novel calibration method. Journal of Civil Structural Health Monitoring, 12, 391–409. https://doi.org/10.1007/s13349-022-00549-5
  94. Ripper, G. P., Ferreira, C. D., Dias, R. S., Micheli, G. B. (2020). Reduction of gravity effect on the results of low-frequency accelerometer calibration. Acta IMEKO, 9 (5). https://doi.org/10.21014/acta_imeko.v9i5.1002
  95. Cai, Q., Song, N., Yang, G., Liu, Y. (2013). Accelerometer calibration with nonlinear scale factor based on multi-position observation. Measurement Science and Technology, 24 (10), 105002. https://doi.org/10.1088/0957-0233/24/10/105002
  96. Won, S. P., Golnaraghi, F. (2010). A triaxial accelerometer calibration method using a mathematical model. IEEE Transactions on Instrumentation and Measurement, 59 (8), 2144–2153. https://doi.org/10.1109/TIM.2009.2031849
  97. Gietzelt, M., Wolf, K.-H., Marschollek, M., Haux, R. (2013). Performance comparison of accelerometer calibration algorithms based on 3D-ellipsoid fitting methods. Computer Methods and Programs in Biomedicine, 111 (1), 62–71. https://doi.org/10.1016/j.cmpb.2013.03.006
  98. Sipos, M., Paces, P., Rohac, J., Novacek, P. (2012). Analyses of triaxial accelerometer calibration algorithms. IEEE Sensors Journal, 12 (5), 1157–1165. https://doi.org/10.1109/JSEN.2011.2167319
  99. Beravs, T., Podobnik, J., Munih, M. (2012). Three-axial accelerometer calibration using Kalman filter covariance matrix for online estimation of optimal sensor orientation. IEEE Transactions on Instrumentation and Measurement, 61 (9), 2501–2511. https://doi.org/10.1109/TIM.2012.2187360
  100. Gao, P., Li, K., Wang, L., Liu, Z. (2017). A self-calibration method for accelerometer nonlinearity errors in triaxis rotational inertial navigation system. IEEE Transactions on Instrumentation and Measurement, 66 (2), 243–253. https://doi.org/10.1109/TIM.2016.2625958
  101. Olsson, F., Kok, M., Halvorsen, K., Schön, T. (2016). Accelerometer calibration using sensor fusion with a gyroscope. In 2016 IEEE Statistical Signal Processing Workshop (SSP). IEEE. https://doi.org/10.1109/SSP.2016.7551836
  102. Särkkä, O., Nieminen, T., Suuriniemi, S., Kettunen, L. (2017). A multi-position calibration method for consumer-grade accelerometers, gyroscopes, and magnetometers to field conditions. IEEE Sensors Journal, 17 (11), 3470–3481. https://doi.org/10.1109/JSEN.2017.2694488
  103. Manzaneque, T., Steeneken, P. G., Alijani, F., Ghatkesar, M. K. (2020). Method to determine the closed-loop precision of resonant sensors from open-loop measurements. IEEE Sensors Journal, 20 (23), 14262–14272. https://doi.org/10.1109/JSEN.2020.3008557
  104. Wang, X., Mou, J., Miao, L., Huang, T., Che, S. (2021). A comparison angular vibration calibration approach based on the IFOG. MAPAN, 36, 607–613. https://doi.org/10.1007/s12647-021-00464-y
  105. Shimoda, T., Kokuyama, W., Nozato, H. (2021). Noise reduction of calibration system for micro-vibration measurement. Measurement: Sensors, 18, 100138. https://doi.org/10.1016/j.measen.2021.100138
  106. Gou, L., Peng, D., Chen, X., Wu, L., Tang, Q. (2019). A self-calibration method for angular displacement sensor working in harsh environments. IEEE Sensors Journal, 19 (8), 3033–3040. https://doi.org/10.1109/JSEN.2018.2879099
  107. Tez, S., Aykutlu, U., Torunbalci, M. M., Akin, T. (2015). A bulk-micromachined three-axis capacitive MEMS accelerometer on a single die. Journal of Microelectromechanical Systems, 24 (5), 1264–1274. https://doi.org/10.1109/JMEMS.2015.2451079
  108. Xu, H., Li, F., Gao, Y., Wang, W. (2020). Simultaneous measurement of tilt and acceleration based on FBG sensor. IEEE Sensors Journal, 20 (24), 14857–14864. https://doi.org/10.1109/JSEN.2020.3010851
Language: English
Page range: 122 - 133
Submitted on: May 31, 2024
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Accepted on: Mar 3, 2025
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Published on: Jun 17, 2025
In partnership with: Paradigm Publishing Services
Publication frequency: Volume open

© 2025 Xin Su, Jiewei Liu, Jiaen Xu, Peng Chen, published by Slovak Academy of Sciences, Institute of Measurement Science
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.