New Scatterometer for Spatial Distribution Measurements of Light Scattering from Materials
Open Access
|Apr 2012DOI: https://doi.org/10.2478/v10048-012-0012-y | Journal eISSN: 1335-8871
Language: English
Page range: 56 - 61
Published on: Apr 19, 2012
In partnership with: Paradigm Publishing Services
Publication frequency: Volume open
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© 2012 E. Kawate, M. Hain, published by Slovak Academy of Sciences, Institute of Measurement Science
This work is licensed under the Creative Commons License.