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New Scatterometer for Spatial Distribution Measurements of Light Scattering from Materials Cover

New Scatterometer for Spatial Distribution Measurements of Light Scattering from Materials

By: E. Kawate and  M. Hain  
Open Access
|Apr 2012

References

  1. Workman, J., Springsteen, A. W. (1997). Applied Spectroscopy. San Diego: Academic Press.
  2. Shitomi, H., Saito, I. (2009). A new absolute diffuse reflectance measurement in the near-IR region based on the modified double-sphere method. Metrologia, 46, S186-S190.10.1088/0026-1394/46/4/S10
  3. Apian-Bennewitz, P. (2010). New scanning goniophotometer for extended BRTF measurements. In Proceedings of SPIE, Vol. 7792, 77920O-1-77920O-20.10.1117/12.860889
  4. Kawate, E. (2008). An optical accessory for absolute reflection and transmission measurements in the wavelength region from 0.24 μm to 25 μm. In Proceedings of SPIE, Vol. 7065, 70650M-1-70650M-11.
  5. Kawate, E. (2003). Symmetry X system and method for absolute measurements of reflectance and transmittance of specular samples. Applied Optics, 42, 5064-5072.10.1364/AO.42.005064
  6. Kawate, E. (2009). Diffuse reflectance and transmittance measurements using a STAR GEM optical accessory. In Measurement 2009: 7th International Conference on Measurement, 20-23 May 2009. Bratislava, Slovakia: Institute of Measurement Science SAS, 270-273.
  7. Lukianowicz, Cz., Karpinski, T. (2003). Scatterometry of ground surfaces. Measurement Science Review, 3 (3), 21-24.
Language: English
Page range: 56 - 61
Published on: Apr 19, 2012
Published by: Slovak Academy of Sciences, Institute of Measurement Science
In partnership with: Paradigm Publishing Services
Publication frequency: Volume open

© 2012 E. Kawate, M. Hain, published by Slovak Academy of Sciences, Institute of Measurement Science
This work is licensed under the Creative Commons License.

Volume 12 (2012): Issue 2 (April 2012)