Shadow Inspection of 3D Objects in Partially Coherent Light

E. Senchenko; Yu. Chugui

doi:10.2478/v10048-011-0018-x

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Shadow Inspection of 3D Objects in Partially Coherent Light

Measurement Science Review

Volume 11 (2011): Issue 4 (August 2011)

By: E. Senchenko and Yu. Chugui

Open Access

|Sep 2011

Abstract

The peculiarities of 3D object image formation in a diffraction-limited system using quasi-monochromatic source with finite angular size are investigated. Algorithms for considerable increase in the accuracy of inspection of 3D objects by shadow optical method are proposed. These algorithms are based on high precision analytical determination of shift of shadow boundary image of thick object and on introduction of corrections depending on the object thickness and the optical system parameters. The theoretical results obtained have been experimentally verified.

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Articles in this issue

DOI: https://doi.org/10.2478/v10048-011-0018-x | Journal eISSN: 1335-8871

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Language: English

Page range: 104 - 107

Published on: Sep 21, 2011

Published by: Slovak Academy of Sciences, Institute of Measurement Science

In partnership with: Paradigm Publishing Services

Publication frequency: Volume open

Keywords:

3D image formation,

shadow method,

dimensional inspection,

partially coherent source

Related subjects:

Engineering,

Electrical engineering,

Control engineering, metrology and testing

© 2011 E. Senchenko, Yu. Chugui, published by Slovak Academy of Sciences, Institute of Measurement Science
This work is licensed under the Creative Commons License.

Volume 11 (2011): Issue 4 (August 2011)