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Measurement of nanopatterned surfaces by real and reciprocal space techniques Cover

Measurement of nanopatterned surfaces by real and reciprocal space techniques

Measurement Science Review
Volume 10 (2010): Issue 5 (October 2010)
By: ,  ,  ,  ,  ,  ,  ,  ,  ,   and    
Open Access
|Dec 2010
Authors

Authors

P. Siffalovic

K. Vegso

M. Jergel

E. Majkova

J. Keckes

G. Maier

M. Cornejo

B. Ziberi

F. Frost

B. Hasse

J. Wiesmann

DOI: https://doi.org/10.2478/v10048-010-0027-1 | Journal eISSN: 1335-8871
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Language: English
Page range: 153 - 156
Published on: Dec 21, 2010
Published by: Slovak Academy of Sciences, Institute of Measurement Science
In partnership with: Paradigm Publishing Services
Publication frequency: Volume open
Keywords:
AFM,
GISAXS,
nanostructures,
ion-beam sputtering
Related subjects:
Engineering,
Electrical engineering,
Control engineering, metrology and testing

© 2010 P. Siffalovic, K. Vegso, M. Jergel, E. Majkova, J. Keckes, G. Maier, M. Cornejo, B. Ziberi, F. Frost, B. Hasse, J. Wiesmann, published by Slovak Academy of Sciences, Institute of Measurement Science
This work is licensed under the Creative Commons License.

Volume 10 (2010): Issue 5 (October 2010)