Have a personal or library account? Click to login
Properties of aluminium oxide thin films deposited in high effective reactive pulsed magnetron sputtering process Cover

Properties of aluminium oxide thin films deposited in high effective reactive pulsed magnetron sputtering process

Materials Science-Poland
Volume 30 (2012): Issue 4 (December 2012)
By: K. Tadaszak,  K. Nitsch,  T. Piasecki and  W. Posadowski  
Open Access
|Dec 2012

References

  1. [1] Dörre E., Hübner H., Alumina: Processing, Properties and Applications, Springer-Verlag, Berlin, 1984. 10.1007/978-3-642-82304-6
    Search in Google Scholar
  2. [2] Edlou S.M., Smajkiewicz, Al-jumaily G.A., Appl. Optics, 3228 (1993), 5601. http://dx.doi.org/10.1364/AO.32.00560110.1364/AO.32.005601
    Search in Google Scholar
  3. [3] Posadowski W.M., Wiatrowski A., Dora J., Radzimski Z., Thin Solid Films, 516 (2008), 4478. http://dx.doi.org/10.1016/j.tsf.2007.05.07710.1016/j.tsf.2007.05.077
    Search in Google Scholar
  4. [4] Krówka K., Wiatrowski A., Posadowski W.M., 8th International Conference on Coatings on Glass and Plastics ICCG. Proceedings, Braunschweig, 13–17 June 2010, 179.
    Search in Google Scholar
  5. [5] Tadaszak K., Nitsch K., Piasecki T., Posadowski W.M., Microel. Reliab., 51 (2011), 1225. http://dx.doi.org/10.1016/j.microrel.2011.03.03010.1016/j.microrel.2011.03.030
    Search in Google Scholar
  6. [6] Barsoukov E., Macdonald J.R., Impedance Spectroscopy, Theory Experiment and Applications, 2nd ed.; Wiley-Interscience: Hoboken, NJ, 2005. http://dx.doi.org/10.1002/047171624310.1002/0471716243
    Search in Google Scholar
  7. [7] Piasecki T., Nitsch K., Surf. Coat. Tech., 205 (2010), 1009. http://dx.doi.org/10.1016/j.surfcoat.2010.07.07410.1016/j.surfcoat.2010.07.074
    Search in Google Scholar
  8. [8] Posadowski W.M., Thin Solid Films, 392 (2001), 201. http://dx.doi.org/10.1016/S0040-6090(01)01028-810.1016/S0040-6090(01)01028-8
    Search in Google Scholar
  9. [9] Posadowski W.M., Polish patent, No 159242, 1992.
    Search in Google Scholar
  10. [10] Macdonald J.R., Solid State Ionics, 13 (1984), 147. http://dx.doi.org/10.1016/0167-2738(84)90049-310.1016/0167-2738(84)90049-3
    Search in Google Scholar
  11. [11] Argall F., Jonscher A.K., Thin Solid Film, 2 (1968), 185. http://dx.doi.org/10.1016/0040-6090(68)90002-310.1016/0040-6090(68)90002-3
    Search in Google Scholar
  12. [12] Hsu C.H., Mansfeld F., Corrosion, 57 (2011), 747. http://dx.doi.org/10.5006/1.328060710.5006/1.3280607
    Search in Google Scholar
  13. [13] Jonscher A.K., J. Phys. D: Appl. Phys., 32 (1999), R57. http://dx.doi.org/10.1088/0022-3727/32/14/20110.1088/0022-3727/32/14/201
    Search in Google Scholar
  14. [14] Rao M.K., Jawalekar S.R., Thin Solid Films, 51 (1978), 185. http://dx.doi.org/10.1016/0040-6090(78)90352-810.1016/0040-6090(78)90352-8
    Search in Google Scholar
DOI: https://doi.org/10.2478/s13536-012-0058-4 | Journal eISSN: 2083-134X | Journal ISSN: 2083-1331
Journal RSS Feed
Language: English
Page range: 323 - 328
Published on: Dec 14, 2012
Published by: Wroclaw University of Science and Technology
In partnership with: Paradigm Publishing Services
Publication frequency: 4 issues per year
Keywords:
impedance spectroscopy,
aluminium oxide,
reactive magnetron sputtering
Related subjects:
Materials sciences,
Materials sciences, other,
Nanomaterials,
Functional and smart materials,
Materials characterization and properties

© 2012 K. Tadaszak, K. Nitsch, T. Piasecki, W. Posadowski, published by Wroclaw University of Science and Technology
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

Previous articleVolume 30 (2012): Issue 4 (December 2012)Next article