Towards Next-Generation Small-Size Boron Ion Implanting Apparatus
By: Jānis Blahins and Arnolds Ubelis
DOI: https://doi.org/10.2478/prolas-2022-0030 | Journal eISSN: 2255-890X (formerly 1407-009X) | Journal ISSN: 1407-009X
Language: English
Page range: 198 - 203
Submitted on: May 24, 2021
Accepted on: Mar 27, 2022
Published on: Jun 2, 2022
Published by: Latvian Academy of Sciences
In partnership with: Paradigm Publishing Services
Related subjects:
© 2022 Jānis Blahins, Arnolds Ubelis, published by Latvian Academy of Sciences
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.