Towards Next-Generation Small-Size Boron Ion Implanting Apparatus
By: Jānis Blahins and Arnolds Ubelis
Language: English
Page range: 198 - 203
Submitted on: May 24, 2021
|Accepted on: Mar 27, 2022
|Published on: Jun 2, 2022
Published by: Latvian Academy of Sciences
In partnership with: Paradigm Publishing Services
Publication frequency: 6 issues per year
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© 2022 Jānis Blahins, Arnolds Ubelis, published by Latvian Academy of Sciences
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.