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Towards Next-Generation Small-Size Boron Ion Implanting Apparatus Cover

Towards Next-Generation Small-Size Boron Ion Implanting Apparatus

Proceedings of the Latvian Academy of Sciences. Section B. Natural, Exact, and Applied Sciences.
Volume 76 (2022): Issue 2 (April 2022)
By: Jānis Blahins and  Arnolds Ubelis  
Open Access
|Jun 2022

Authors

Jānis Blahins

janis.blahins@lu.lv

National Science Platform Platform FOTONIKA-LV, Institute of Atomic Physics and Spectroscopy, University of Latvia, Rīga, Latvia

Arnolds Ubelis

National Science Platform Platform FOTONIKA-LV, Institute of Atomic Physics and Spectroscopy, University of Latvia, Rīga, Latvia
DOI: https://doi.org/10.2478/prolas-2022-0030 | Journal eISSN: 2255-890X | Journal ISSN: 1407-009X
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Language: English
Page range: 198 - 203
Submitted on: May 24, 2021
|
Accepted on: Mar 27, 2022
|
Published on: Jun 2, 2022
Published by: Latvian Academy of Sciences
In partnership with: Paradigm Publishing Services
Publication frequency: 6 issues per year
Keywords:
ion implantation,
boron ion source,
simple implanting apparatus
Related subjects:
General interest,
Mathematics,
General mathematics

© 2022 Jānis Blahins, Arnolds Ubelis, published by Latvian Academy of Sciences
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

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