Fig. 1.
Biaxial accelerometer model.
Fig. 2.
The two effective modes of the biaxial accelerometer: (a) X-axis working mode, frequency is 4149 Hz; (b) Y-axis working mode, frequency is 7454 Hz.
Fig. 3.
Closed-loop control and temperature compensation system block diagram.
Fig. 4.
Output of the dual-axis accelerometer within the measurement range of ±1 g.
Fig. 5.
Output when the accelerometer rotates through one full cycle.
Fig. 6.
Accelerometer structure and temperature experimental equipment: (a) Accelerometer structure; (b) Temperature experimental equipment.
Fig. 7.
Stable output of the accelerometer at each point within the full temperature range before temperature compensation: (a) X-axis; (b) Y-axis.
Fig. 8.
Bias stability of the accelerometer over the entire range before temperature compensation.
Fig. 9.
Sensor and temperature compensation module.
Fig. 10.
Stable output of the accelerometer at each sampling point within the full temperature range after temperature compensation.
Fig. 11.
Bias stability of the accelerometer over the entire range after temperature compensation.