3D Printed Pressure Sensor Based on Surface Acoustic Wave Resonator

Baofa Hu; Zhiwei Li; Yuanjie Wan; Peng Zhou; Chunquan Zhang; Haisheng San

doi:10.2478/msr-2021-0011

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3D Printed Pressure Sensor Based on Surface Acoustic Wave Resonator

Measurement Science Review

Volume 21 (2021): Issue 3 (June 2021)

By: Baofa Hu, Zhiwei Li, Yuanjie Wan, Peng Zhou, Chunquan Zhang and Haisheng San

Open Access

|Jun 2021

Abstract

This paper reports a 3-dimentional (3D) pressure sensor based on surface acoustic wave (SAW) resonators. The SAW resonators were designed and fabricated on 128°Y-X LiNbO3 substrate using the MEMS technology. The pressure sensing structure was 3D-printed using polyactic acid plastic, and two SAW resonators were integrated in the 3D-printed chamber structure for both temperature and pressure sensing. The SAW-based gas pressure sensors demonstrate a sensitivity of 589 ppm/MPa at the pressure range of 100-600 kPa and temperature of 40 °C.

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Articles in this issue

DOI: https://doi.org/10.2478/msr-2021-0011 | Journal eISSN: 1335-8871

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Language: English

Page range: 76 - 81

Submitted on: Mar 30, 2021

Accepted on: May 31, 2021

Published on: Jun 24, 2021

Published by: Slovak Academy of Sciences, Institute of Measurement Science

In partnership with: Paradigm Publishing Services

Publication frequency: Volume open

Keywords:

Surface acoustic wave,

Related subjects:

Electrical engineering,

Control engineering, metrology and testing

© 2021 Baofa Hu, Zhiwei Li, Yuanjie Wan, Peng Zhou, Chunquan Zhang, Haisheng San, published by Slovak Academy of Sciences, Institute of Measurement Science
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

Volume 21 (2021): Issue 3 (June 2021)