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Generating Sub-nanometer Displacement Using Reduction Mechanism Consisting of Torsional Leaf Spring Hinges Cover

Generating Sub-nanometer Displacement Using Reduction Mechanism Consisting of Torsional Leaf Spring Hinges

Measurement Science Review
Volume 14 (2014): Issue 1 (February 2014)
By: Makoto Fukuda,  Masato Hayashi and  Sintaro Marita  
Open Access
|Mar 2014

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DOI: https://doi.org/10.2478/msr-2014-0008 | Journal eISSN: 1335-8871
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Language: English
Page range: 48 - 51
Published on: Mar 6, 2014
Published by: Slovak Academy of Sciences, Institute of Measurement Science
In partnership with: Paradigm Publishing Services
Publication frequency: Volume open
Keywords:
Sub-nanometer displacement,
reduction mechanism,
torsional leaf spring hinge,
displacement standard,
AFM verification
Related subjects:
Engineering,
Electrical engineering,
Control engineering, metrology and testing

© 2014 Makoto Fukuda, Masato Hayashi, Sintaro Marita, published by Slovak Academy of Sciences, Institute of Measurement Science
This work is licensed under the Creative Commons License.

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