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Generating Sub-nanometer Displacement Using Reduction Mechanism Consisting of Torsional Leaf Spring Hinges Cover

Generating Sub-nanometer Displacement Using Reduction Mechanism Consisting of Torsional Leaf Spring Hinges

Open Access
|Mar 2014

References

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Language: English
Page range: 48 - 51
Published on: Mar 6, 2014
Published by: Slovak Academy of Sciences, Institute of Measurement Science
In partnership with: Paradigm Publishing Services
Publication frequency: Volume open

© 2014 Makoto Fukuda, Masato Hayashi, Sintaro Marita, published by Slovak Academy of Sciences, Institute of Measurement Science
This work is licensed under the Creative Commons License.