The Unpredictable Errors of Micro Tactile Metrology – Factors Affecting Stylus tip Contamination

Kinnell, P.; Habeb, R.

doi:10.2478/msr-2013-0045

Abstract

In 3D tactile micro-metrology the contamination of probing devices is a major problem that affects the accuracy and repeatability of measured dimensions. Despite a large body of research in the field of micro CMM and micro probe design there is limited research which has been done so far to explain and tackle this problem. In this work, experimental probing on a range of materials using a micro coordinate measuring machine was conducted to investigate the mechanism of stylus tip contamination. In addition the effects of surface finish on the build-up of stylus tip contamination were also studied. The results provide practitioners with guidelines which allow for the likely build-up of stylus tip contamination to be minimized based on sample material type and surface finish.

References

[1] Liang, Q., Zhang, D., Wang, Y., Coppola, G., Ge, Y. (2013). PM based multi-component F/T sensors- State of the art and trends. Robotics and Computer- Integrated Manufacturing, 29 (4), 1-7.10.1016/j.rcim.2012.12.002
Search in Google Scholar
[2] Peiner, E., Balke, M., Doering, L. (2007). Slender tactile sensor for high-aspect-ratio micro metrology. In IEEE Sensors, 28-31 October 2007. IEEE, 760-763.10.1109/ICSENS.2007.4388511
Search in Google Scholar
[3] Ping, Y., Tomohiko, T., Satoru, T., Kiyoshi, T., Osamu, S., Sonko, O., Toshiyuki, T. (2011).Development of high-precision micro-coordinate measuring machine: Multi-probe measurement system for measuring yaw and straightness motion error of XY linear stage. Precision Engineering, 35 (3), 424-430.
Search in Google Scholar
[4] Weckenmann, A., Estler, T., Peggs, G., McMurtry, D. (2004). Probing systems in dimensional metrology. In CIRP Annals - Manufacturing Technology, 53 (2), 657-684.10.1016/S0007-8506(07)60034-1
Search in Google Scholar
[5] Meli, F., Küng, A. (2007). AFM investigation on surface damage caused by mechanical probing with small ruby spheres. Measurement Science and Technology, 18, 496-502.10.1088/0957-0233/18/2/S24
Search in Google Scholar
[6] Nicolet, A., Kung, A., Meli, F. (2012). Study of sapphire probe tip wear when scanning on different materials. Measurement Science and Technology, 23, 094016.10.1088/0957-0233/23/9/094016
Search in Google Scholar
[7] Stone, J., Muralikrishnan, B., Sahay, C. (2011).Geometric effects when measuring small holes with micro contact probes. Research of the National Institute of Standards and Technology, 116, 573-587.10.6028/jres.116.006455033826989585
Search in Google Scholar
[8] Muralikrishnan, B., Stone, J., Stoup, J. (2006). Fiber deflection probe for small hole metrology. Precision Engineering, 30, 154-164.10.1016/j.precisioneng.2005.07.004
Search in Google Scholar
[9] Stone, J., Muralikrishnan, B., Stoup, J. (2005). A fiber probe for CMM measurements of small features. In Recent Developments in Traceable Dimensional Measurement III. Proc. SPIE 5879, 254-264.
Search in Google Scholar
[10] Wozniak, A., Mayer, R., Balazinski, M. (2009). Stylus tip envelop method: Corrected measured point determination in high definition coordinate metrology.International Journal of Advanced Manufacturing Technology, 42, 505-514.10.1007/s00170-008-1615-1
Search in Google Scholar
[11] Kinnell, P., Habeb, R. (2013) An evaluation of cleaning methods for micro-CMM probes.Measurement Science and Technology, 24, 085603.10.1088/0957-0233/24/8/085603
Search in Google Scholar

The Unpredictable Errors of Micro Tactile Metrology – Factors Affecting Stylus tip Contamination

Abstract

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