Skip to main content
Have a personal or library account? Click to login
The Unpredictable Errors of Micro Tactile Metrology – Factors Affecting Stylus tip Contamination Cover

The Unpredictable Errors of Micro Tactile Metrology – Factors Affecting Stylus tip Contamination

Measurement Science Review
Volume 13 (2013): Issue 6 (December 2013)
By:  and    
Open Access
|Jan 2014
References

References

  1. [1] Liang, Q., Zhang, D., Wang, Y., Coppola, G., Ge, Y. (2013). PM based multi-component F/T sensors- State of the art and trends. Robotics and Computer- Integrated Manufacturing, 29 (4), 1-7.
    Open DOISearch in Google Scholar
  2. [2] Peiner, E., Balke, M., Doering, L. (2007). Slender tactile sensor for high-aspect-ratio micro metrology. In IEEE Sensors, 28-31 October 2007. IEEE, 760-763.
    Open DOISearch in Google Scholar
  3. [3] Ping, Y., Tomohiko, T., Satoru, T., Kiyoshi, T., Osamu, S., Sonko, O., Toshiyuki, T. (2011).Development of high-precision micro-coordinate measuring machine: Multi-probe measurement system for measuring yaw and straightness motion error of XY linear stage. Precision Engineering, 35 (3), 424-430.
    Search in Google Scholar
  4. [4] Weckenmann, A., Estler, T., Peggs, G., McMurtry, D. (2004). Probing systems in dimensional metrology. In CIRP Annals - Manufacturing Technology, 53 (2), 657-684.
    Open DOISearch in Google Scholar
  5. [5] Meli, F., Küng, A. (2007). AFM investigation on surface damage caused by mechanical probing with small ruby spheres. Measurement Science and Technology, 18, 496-502.
    Open DOISearch in Google Scholar
  6. [6] Nicolet, A., Kung, A., Meli, F. (2012). Study of sapphire probe tip wear when scanning on different materials. Measurement Science and Technology, 23, 094016.
    Open DOISearch in Google Scholar
  7. [7] Stone, J., Muralikrishnan, B., Sahay, C. (2011).Geometric effects when measuring small holes with micro contact probes. Research of the National Institute of Standards and Technology, 116, 573-587.
    Open DOISearch in Google Scholar
  8. [8] Muralikrishnan, B., Stone, J., Stoup, J. (2006). Fiber deflection probe for small hole metrology. Precision Engineering, 30, 154-164.
    Open DOISearch in Google Scholar
  9. [9] Stone, J., Muralikrishnan, B., Stoup, J. (2005). A fiber probe for CMM measurements of small features. In Recent Developments in Traceable Dimensional Measurement III. Proc. SPIE 5879, 254-264.
    Search in Google Scholar
  10. [10] Wozniak, A., Mayer, R., Balazinski, M. (2009). Stylus tip envelop method: Corrected measured point determination in high definition coordinate metrology.International Journal of Advanced Manufacturing Technology, 42, 505-514.
    Open DOISearch in Google Scholar
  11. [11] Kinnell, P., Habeb, R. (2013) An evaluation of cleaning methods for micro-CMM probes.Measurement Science and Technology, 24, 085603.
    Open DOISearch in Google Scholar
DOI: https://doi.org/10.2478/msr-2013-0045 | Journal eISSN: 1335-8871
Journal RSS Feed
Language: English
Page range: 305 - 310
Published on: Jan 14, 2014
Published by: Slovak Academy of Sciences, Institute of Measurement Science
In partnership with: Paradigm Publishing Services
Publication frequency: Volume open
Keywords:
Micro-coordinate measurement machine,
μCMM,
tactile probing,
contaminant build-up
Related subjects:
Engineering,
Electrical engineering,
Control engineering, metrology and testing

© 2014 P. Kinnell, R. Habeb, published by Slovak Academy of Sciences, Institute of Measurement Science
This work is licensed under the Creative Commons License.

Volume 13 (2013): Issue 6 (December 2013)
Previous article
Next article