Annealing effect on the structural and optoelectronic properties of Cu-Cr-O thin films deposited by reactive magnetron sputtering using a single CuCr target Cover

Annealing effect on the structural and optoelectronic properties of Cu-Cr-O thin films deposited by reactive magnetron sputtering using a single CuCr target

Materials Science-Poland

Volume 41 (2023): Issue 1 (March 2023)

By:

Du-Cheng Tsai, Erh-Chiang Chen, Yen-Lin Huang, Fuh-Sheng Shieu and Zue-Chin Chang

Open Access

|Aug 2023

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DOI: https://doi.org/10.2478/msp-2023-0017 | Journal eISSN: 2083-134X | Journal ISSN: 2083-1331

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Language: English

Page range: 191 - 201

Submitted on: May 15, 2023

Accepted on: Jul 13, 2023

Published on: Aug 25, 2023

Published by: Sciendo

In partnership with: Paradigm Publishing Services

Publication frequency: 4 times per year

Keywords:

Transparent conducting oxide,

copper chromium oxide,

annealing temperature,

optoelectronic properties

Related subjects:

Materials sciences,

Materials sciences, other,

Functional and smart materials,

Materials characterization and properties

© 2023 Du-Cheng Tsai, Erh-Chiang Chen, Yen-Lin Huang, Fuh-Sheng Shieu, Zue-Chin Chang, published by Sciendo
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.

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