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Structural and surface analysis of chemical vapor deposited boron doped aluminum nitride thin film on aluminum substrates Cover

Structural and surface analysis of chemical vapor deposited boron doped aluminum nitride thin film on aluminum substrates

Materials Science-Poland
Volume 37 (2019): Issue 3 (September 2019)
By: Shanmugan Subramani and  Mutharasu Devarajan  
Open Access
|Oct 2019

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DOI: https://doi.org/10.2478/msp-2019-0056 | Journal eISSN: 2083-134X | Journal ISSN: 2083-1331
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Language: English
Page range: 395 - 403
Submitted on: Apr 19, 2018
|
Accepted on: Apr 23, 2019
|
Published on: Oct 18, 2019
Published by: Wroclaw University of Science and Technology
In partnership with: Paradigm Publishing Services
Publication frequency: 4 issues per year
Keywords:
B-AlN,
thin film synthesis,
CVD,
Al substrate structural parameter,
surface analysis
Related subjects:
Materials sciences,
Materials sciences, other,
Nanomaterials,
Functional and smart materials,
Materials characterization and properties

© 2019 Shanmugan Subramani, Mutharasu Devarajan, published by Wroclaw University of Science and Technology
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

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