Structural and surface analysis of chemical vapor deposited boron doped aluminum nitride thin film on aluminum substrates
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DOI: https://doi.org/10.2478/msp-2019-0056 | Journal eISSN: 2083-134X (formerly 2083-124X) | Journal ISSN: 2083-1331
Language: English
Page range: 395 - 403
Submitted on: Apr 19, 2018
Accepted on: Apr 23, 2019
Published on: Oct 18, 2019
Published by: Wroclaw University of Science and Technology
In partnership with: Paradigm Publishing Services
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© 2019 Shanmugan Subramani, Mutharasu Devarajan, published by Wroclaw University of Science and Technology
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.