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Structural and surface analysis of chemical vapor deposited boron doped aluminum nitride thin film on aluminum substrates Cover

Structural and surface analysis of chemical vapor deposited boron doped aluminum nitride thin film on aluminum substrates

Open Access
|Oct 2019

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DOI: https://doi.org/10.2478/msp-2019-0056 | Journal eISSN: 2083-134X | Journal ISSN: 2083-1331
Language: English
Page range: 395 - 403
Submitted on: Apr 19, 2018
Accepted on: Apr 23, 2019
Published on: Oct 18, 2019
Published by: Wroclaw University of Science and Technology
In partnership with: Paradigm Publishing Services
Publication frequency: 4 issues per year

© 2019 Shanmugan Subramani, Mutharasu Devarajan, published by Wroclaw University of Science and Technology
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.