Structural and surface analysis of chemical vapor deposited boron doped aluminum nitride thin film on aluminum substrates
Authors
Shanmugan Subramani
Nano Optoelectronics Research Laboratory, School of Physics, Universiti Sains Malaysia (USM), Minden, Malaysia
Mutharasu Devarajan
Nano Optoelectronics Research Laboratory, School of Physics, Universiti Sains Malaysia (USM), Minden, Malaysia
Language: English
Page range: 395 - 403
Submitted on: Apr 19, 2018
Accepted on: Apr 23, 2019
Published on: Oct 18, 2019
Published by: Wroclaw University of Science and Technology
In partnership with: Paradigm Publishing Services
Publication frequency: 4 issues per year
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© 2019 Shanmugan Subramani, Mutharasu Devarajan, published by Wroclaw University of Science and Technology
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.