Influence of modulation frequency on the synthesis of thin films in pulsed magnetron sputtering processes
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DOI: https://doi.org/10.2478/msp-2018-0078 | Journal eISSN: 2083-134X (formerly 2083-124X) | Journal ISSN: 2083-1331
Language: English
Page range: 697 - 703
Submitted on: Nov 29, 2017
Accepted on: Jul 16, 2018
Published on: Feb 1, 2019
Published by: Wroclaw University of Science and Technology
In partnership with: Paradigm Publishing Services
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© 2019 G.W. Strzelecki, K. Nowakowska-Langier, R. Chodun, S. Okrasa, B. Wicher, K. Zdunek, published by Wroclaw University of Science and Technology
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.