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Impact of lanthanum doped zirconium oxide (LaZrO2) gate dielectric material on FinFET inverter Cover

Impact of lanthanum doped zirconium oxide (LaZrO2) gate dielectric material on FinFET inverter

Open Access
|Nov 2020

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Language: English
Page range: 1 - 10
Submitted on: Sep 19, 2020
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Published on: Nov 19, 2020
In partnership with: Paradigm Publishing Services
Publication frequency: 1 issue per year

© 2020 Gurpurneet Kaur, Sandeep Singh Gill, Munish Rattan, published by Professor Subhas Chandra Mukhopadhyay
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.