Optimization of Nano-Grating Pitch Evaluation Method Based on Line Edge Roughness Analysis
By: Jie Chen, Jie Liu, Xingrui Wang, Longfei Zhang, Xiao Deng, Xinbin Cheng and Tongbao Li
DOI: https://doi.org/10.1515/msr-2017-0032 | Journal eISSN: 1335-8871
Language: English
Page range: 264 - 268
Submitted on: Jul 30, 2017
|Accepted on: Nov 13, 2017
|Published on: Nov 22, 2017
In partnership with: Paradigm Publishing Services
Publication frequency: Volume open
Related subjects:
© 2017 Jie Chen, Jie Liu, Xingrui Wang, Longfei Zhang, Xiao Deng, Xinbin Cheng, Tongbao Li, published by Slovak Academy of Sciences, Institute of Measurement Science
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.