Optimization of Nano-Grating Pitch Evaluation Method Based on Line Edge Roughness Analysis
By: Jie Chen, Jie Liu, Xingrui Wang, Longfei Zhang, Xiao Deng, Xinbin Cheng and Tongbao Li
Authors
Jie Chen
Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, 200092,, Shanghai, China
Jie Liu
Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, 200092,, Shanghai, China
Xingrui Wang
Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, 200092,, Shanghai, China
Longfei Zhang
Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, 200092,, Shanghai, China
Xiao Deng
School of Aerospace Engineering and Applied Mechanics, Tongji University, 200092,, Shanghai, China
Xinbin Cheng
Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, 200092,, Shanghai, China
Tongbao Li
Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, 200092,, Shanghai, China
DOI: https://doi.org/10.1515/msr-2017-0032 | Journal eISSN: 1335-8871
Language: English
Page range: 264 - 268
Submitted on: Jul 30, 2017
Accepted on: Nov 13, 2017
Published on: Nov 22, 2017
In partnership with: Paradigm Publishing Services
Publication frequency: Volume open
Related subjects:
© 2017 Jie Chen, Jie Liu, Xingrui Wang, Longfei Zhang, Xiao Deng, Xinbin Cheng, Tongbao Li, published by Slovak Academy of Sciences, Institute of Measurement Science
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.