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Optimization of Nano-Grating Pitch Evaluation Method Based on Line Edge Roughness Analysis Cover

Optimization of Nano-Grating Pitch Evaluation Method Based on Line Edge Roughness Analysis

Open Access
|Nov 2017

Authors

Jie Chen

Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, 200092,, Shanghai, China

Jie Liu

Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, 200092,, Shanghai, China

Xingrui Wang

Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, 200092,, Shanghai, China

Longfei Zhang

Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, 200092,, Shanghai, China

Xiao Deng

1110490dengxiao@tongji.edu.cn

School of Aerospace Engineering and Applied Mechanics, Tongji University, 200092,, Shanghai, China

Xinbin Cheng

Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, 200092,, Shanghai, China

Tongbao Li

Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, 200092,, Shanghai, China
Language: English
Page range: 264 - 268
Submitted on: Jul 30, 2017
|
Accepted on: Nov 13, 2017
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Published on: Nov 22, 2017
In partnership with: Paradigm Publishing Services
Publication frequency: Volume open

© 2017 Jie Chen, Jie Liu, Xingrui Wang, Longfei Zhang, Xiao Deng, Xinbin Cheng, Tongbao Li, published by Slovak Academy of Sciences, Institute of Measurement Science
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.