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Interferometric Surface Relief Measurements with Subnano/Picometer Height Resolution Cover

Interferometric Surface Relief Measurements with Subnano/Picometer Height Resolution

Open Access
|Oct 2017

References

  1. [1] Guilemany, J.M., Miguel, J.M., Armada, S., Vizcaino, S., Climent, F. (2001). Use of scanning white light interferometry in the characterization of wear mechanisms in thermal-sprayed coatings. Materials Characterization, 47 (3-4), 307-314.10.1016/S1044-5803(02)00180-8
  2. [2] De Groot, P., Biegen, J., Clark, J., Lega, X.C., Grigg, D. (2002). Optical interferometry for measurement of the geometric dimensions of industrial parts. Applied Optics, 41 (19), 3853-3860.10.1364/AO.41.003853
  3. [3] De Groot, P. (2011). Coherence scanning interferometry. In Optical Measurement of Surface Topography. Springer, 187-208.10.1007/978-3-642-12012-1_9
  4. [4] Niehues, J., Lehmann, P., Xie, W. (2012). Low coherent Linnik interferometer optimized for use in nano-measuring machines. Measurement Science and Technology, 23 (12), 125002.10.1088/0957-0233/23/12/125002
  5. [5] Windecker, R., Fleischer, M., Körner, K., Tiziani, H.J. (2001). Testing micro devices with fringe projection and white-light interferometry. Optics and Lasers in Engineering, 36 (2), 141-154.10.1016/S0143-8166(01)00038-0
  6. [6] Hariharan, P., Malakara, D. (1995). Selected Papers on Interference, Interferometry, and Interferometric Metrology. SPIE Optical Engineering Press.
  7. [7] Creath, K., Wyant, J.C. (1990). Absolute measurement of surface roughness. Applied Optics, 29 (26), 3823-3827.10.1364/AO.29.00382320567490
  8. [8] Sitnikov, S.V., Kosolobov, S.S., Shcheglov, D.V., Latyshev, A.V. (2011). Method of forming flat smooth surface of solid material. Patent RU 2453874.
  9. [9] Sysoev, E.V. (2007). White-light interferometer with partial correlogram scanning. Optoelectronics, Instrumentation and Data Processing, 43 (1), 83-89.10.3103/S8756699007010128
  10. [10] Sysoev, E.V., Vykhristuk, I.A., Kulikov, R.V., Potashnikov, A.K., Razum, V.A., Stepnov, L.M. (2010). Interference microscope-profilometer. Optoelectronics, Instrumentation and Data Processing, 46 (2), 198-205.10.3103/S8756699010020111
  11. [11] Rosenberg, G.V. (1953). Interferencionnaya mikroskopiya. Uspehi fizicheskih nauk, L (2), 279-281. (in Russian)
  12. [12] Dubois, A., Selb, J., Vabre, L., Boccara, A.-C. (2000). Phase measurement with wide-apperture interferometers. Applied Optics, 39 (14), 2326-2331.10.1364/AO.39.00232618345141
Language: English
Page range: 213 - 218
Submitted on: Mar 3, 2017
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Accepted on: Sep 18, 2017
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Published on: Oct 23, 2017
In partnership with: Paradigm Publishing Services
Publication frequency: Volume open

© 2017 Evgeny Sysoev, Sergey Kosolobov, Rodion Kulikov, Alexander Latyshev, Sergey Sitnikov, Ignat Vykhristyuk, published by Slovak Academy of Sciences, Institute of Measurement Science
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.