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Interferometric Surface Relief Measurements with Subnano/Picometer Height Resolution Cover

Interferometric Surface Relief Measurements with Subnano/Picometer Height Resolution

Measurement Science Review
Volume 17 (2017): Issue 5 (October 2017)
By: Evgeny Sysoev,  Sergey Kosolobov,  Rodion Kulikov,  Alexander Latyshev,  Sergey Sitnikov and  Ignat Vykhristyuk  
Open Access
|Oct 2017

Authors

Evgeny Sysoev

evsml@mail.ru

Technological Design Institute of Scientific Instrument Engineering, Siberian Branch of the Russian Academy of Sciences (TDI SIE SB RAS), Novosibirsk, Russian Federation

Sergey Kosolobov

kosolobov@isp.nsc.ru

A.V. Rzhanov Institute of Semiconductor Physics, Siberian Branch of the Russian Academy of Sciences (ISP SB RAS), Novosibirsk, Russian Federation

Rodion Kulikov

Technological Design Institute of Scientific Instrument Engineering, Siberian Branch of the Russian Academy of Sciences (TDI SIE SB RAS), Novosibirsk, Russian Federation

Alexander Latyshev

A.V. Rzhanov Institute of Semiconductor Physics, Siberian Branch of the Russian Academy of Sciences (ISP SB RAS), Novosibirsk, Russian Federation

Sergey Sitnikov

A.V. Rzhanov Institute of Semiconductor Physics, Siberian Branch of the Russian Academy of Sciences (ISP SB RAS), Novosibirsk, Russian Federation

Ignat Vykhristyuk

Technological Design Institute of Scientific Instrument Engineering, Siberian Branch of the Russian Academy of Sciences (TDI SIE SB RAS), Novosibirsk, Russian Federation
DOI: https://doi.org/10.1515/msr-2017-0025 | Journal eISSN: 1335-8871
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Language: English
Page range: 213 - 218
Submitted on: Mar 3, 2017
|
Accepted on: Sep 18, 2017
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Published on: Oct 23, 2017
Published by: Slovak Academy of Sciences, Institute of Measurement Science
In partnership with: Paradigm Publishing Services
Publication frequency: Volume open
Keywords:
nanorelief,
monatomic steps,
low-coherence,
white light interferometer,
subnanometer resolution
Related subjects:
Engineering,
Electrical engineering,
Control engineering, metrology and testing

© 2017 Evgeny Sysoev, Sergey Kosolobov, Rodion Kulikov, Alexander Latyshev, Sergey Sitnikov, Ignat Vykhristyuk, published by Slovak Academy of Sciences, Institute of Measurement Science
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

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