Interferometric Surface Relief Measurements with Subnano/Picometer Height Resolution
Authors
Evgeny Sysoev
Technological Design Institute of Scientific Instrument Engineering, Siberian Branch of the Russian Academy of Sciences (TDI SIE SB RAS), Novosibirsk, Russian Federation
Sergey Kosolobov
A.V. Rzhanov Institute of Semiconductor Physics, Siberian Branch of the Russian Academy of Sciences (ISP SB RAS), Novosibirsk, Russian Federation
Rodion Kulikov
Technological Design Institute of Scientific Instrument Engineering, Siberian Branch of the Russian Academy of Sciences (TDI SIE SB RAS), Novosibirsk, Russian Federation
Alexander Latyshev
A.V. Rzhanov Institute of Semiconductor Physics, Siberian Branch of the Russian Academy of Sciences (ISP SB RAS), Novosibirsk, Russian Federation
Sergey Sitnikov
A.V. Rzhanov Institute of Semiconductor Physics, Siberian Branch of the Russian Academy of Sciences (ISP SB RAS), Novosibirsk, Russian Federation
Ignat Vykhristyuk
Technological Design Institute of Scientific Instrument Engineering, Siberian Branch of the Russian Academy of Sciences (TDI SIE SB RAS), Novosibirsk, Russian Federation
DOI: https://doi.org/10.1515/msr-2017-0025 | Journal eISSN: 1335-8871
Language: English
Page range: 213 - 218
Submitted on: Mar 3, 2017
Accepted on: Sep 18, 2017
Published on: Oct 23, 2017
In partnership with: Paradigm Publishing Services
Publication frequency: Volume open
Keywords:
Related subjects:
© 2017 Evgeny Sysoev, Sergey Kosolobov, Rodion Kulikov, Alexander Latyshev, Sergey Sitnikov, Ignat Vykhristyuk, published by Slovak Academy of Sciences, Institute of Measurement Science
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.