Interferometric Surface Relief Measurements with Subnano/Picometer Height Resolution
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DOI: https://doi.org/10.1515/msr-2017-0025 | Journal eISSN: 1335-8871
Language: English
Page range: 213 - 218
Submitted on: Mar 3, 2017
Accepted on: Sep 18, 2017
Published on: Oct 23, 2017
In partnership with: Paradigm Publishing Services
Publication frequency: Volume open
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© 2017 Evgeny Sysoev, Sergey Kosolobov, Rodion Kulikov, Alexander Latyshev, Sergey Sitnikov, Ignat Vykhristyuk, published by Slovak Academy of Sciences, Institute of Measurement Science
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.