Have a personal or library account? Click to login
Interferometric Surface Relief Measurements with Subnano/Picometer Height Resolution Cover

Interferometric Surface Relief Measurements with Subnano/Picometer Height Resolution

Measurement Science Review
Volume 17 (2017): Issue 5 (October 2017)
By: Evgeny Sysoev,  Sergey Kosolobov,  Rodion Kulikov,  Alexander Latyshev,  Sergey Sitnikov and  Ignat Vykhristyuk  
Open Access
|Oct 2017

Download Article

Download the full article as a PDF file.

DOI: https://doi.org/10.1515/msr-2017-0025 | Journal eISSN: 1335-8871
Journal RSS Feed
Language: English
Page range: 213 - 218
Submitted on: Mar 3, 2017
|
Accepted on: Sep 18, 2017
|
Published on: Oct 23, 2017
Published by: Slovak Academy of Sciences, Institute of Measurement Science
In partnership with: Paradigm Publishing Services
Publication frequency: Volume open
Keywords:
nanorelief,
monatomic steps,
low-coherence,
white light interferometer,
subnanometer resolution
Related subjects:
Engineering,
Electrical engineering,
Control engineering, metrology and testing

© 2017 Evgeny Sysoev, Sergey Kosolobov, Rodion Kulikov, Alexander Latyshev, Sergey Sitnikov, Ignat Vykhristyuk, published by Slovak Academy of Sciences, Institute of Measurement Science
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

Volume 17 (2017): Issue 5 (October 2017)Next article