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Thin SixNyCz films deposited from hexamethyldisilazane by RF PECVD technique for optical filter applications Cover

Thin SixNyCz films deposited from hexamethyldisilazane by RF PECVD technique for optical filter applications

Materials Science-Poland
Volume 36 (2018): Issue 1 (March 2018)
By: Katarzyna Oleśko,  Hieronim Szymanowski,  Maciej Gazicki-Lipman,  Jacek Balcerzak,  Witold Szymań Ski,  Wojciech Pawlak and  Anna Sobczyk-Guzenda  
Open Access
|May 2018

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DOI: https://doi.org/10.1515/msp-2017-0109 | Journal eISSN: 2083-134X | Journal ISSN: 2083-1331
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Language: English
Page range: 56 - 68
Submitted on: Mar 13, 2017
|
Accepted on: Dec 8, 2017
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Published on: May 18, 2018
Published by: Wroclaw University of Science and Technology
In partnership with: Paradigm Publishing Services
Publication frequency: 4 issues per year
Keywords:
HMDSN,
PECVD,
refractive index,
chemical structure,
adhesion
Related subjects:
Materials sciences,
Materials sciences, other,
Nanomaterials,
Functional and smart materials,
Materials characterization and properties

© 2018 Katarzyna Oleśko, Hieronim Szymanowski, Maciej Gazicki-Lipman, Jacek Balcerzak, Witold Szymań Ski, Wojciech Pawlak, Anna Sobczyk-Guzenda, published by Wroclaw University of Science and Technology
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.

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