Thin SixNyCz films deposited from hexamethyldisilazane by RF PECVD technique for optical filter applications
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Authors
Katarzyna Oleśko
Institute of Materials Science and Engineering, Lodz University of Technology, Stefanowskiego 1/15, 90-924, Lodz, Poland
Hieronim Szymanowski
Institute of Materials Science and Engineering, Lodz University of Technology, Stefanowskiego 1/15, 90-924, Lodz, Poland
Maciej Gazicki-Lipman
Institute of Materials Science and Engineering, Lodz University of Technology, Stefanowskiego 1/15, 90-924, Lodz, Poland
Jacek Balcerzak
Department of Molecular Engineering, Faculty of Process and Environmental Engineering, Lodz University of Technology, Wolczanska 213, 90-924, Lodz, Poland
Witold Szymań Ski
Institute of Materials Science and Engineering, Lodz University of Technology, Stefanowskiego 1/15, 90-924, Lodz, Poland
Wojciech Pawlak
Institute of Materials Science and Engineering, Lodz University of Technology, Stefanowskiego 1/15, 90-924, Lodz, Poland
Anna Sobczyk-Guzenda
anna.sobczyk-guzenda@p.lodz.pl
Institute of Materials Science and Engineering, Lodz University of Technology, Stefanowskiego 1/15, 90-924, Lodz, Poland
Language: English
Page range: 56 - 68
Submitted on: Mar 13, 2017
Accepted on: Dec 8, 2017
Published on: May 18, 2018
Published by: Wroclaw University of Science and Technology
In partnership with: Paradigm Publishing Services
Publication frequency: 4 issues per year
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© 2018 Katarzyna Oleśko, Hieronim Szymanowski, Maciej Gazicki-Lipman, Jacek Balcerzak, Witold Szymań Ski, Wojciech Pawlak, Anna Sobczyk-Guzenda, published by Wroclaw University of Science and Technology
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.