Thin SixNyCz films deposited from hexamethyldisilazane by RF PECVD technique for optical filter applications

Katarzyna Oleśko; Hieronim Szymanowski; Maciej Gazicki-Lipman; Jacek Balcerzak; Witold Szymań Ski; Wojciech Pawlak; Anna Sobczyk-Guzenda

doi:10.1515/msp-2017-0109

References

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Thin SixNyCz films deposited from hexamethyldisilazane by RF PECVD technique for optical filter applications

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