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Effect of target power on the physical properties of Ti thin films prepared by DC magnetron sputtering with supported discharge Cover

Effect of target power on the physical properties of Ti thin films prepared by DC magnetron sputtering with supported discharge

By: A. Kavitha,  R. Kannan and  S. Rajashabala  
Open Access
|Feb 2017

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DOI: https://doi.org/10.1515/msp-2017-0022 | Journal eISSN: 2083-134X | Journal ISSN: 2083-1331
Language: English
Page range: 173 - 180
Submitted on: Jul 5, 2016
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Accepted on: Jan 5, 2017
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Published on: Feb 24, 2017
In partnership with: Paradigm Publishing Services
Publication frequency: 4 issues per year

© 2017 A. Kavitha, R. Kannan, S. Rajashabala, published by Wroclaw University of Science and Technology
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.