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Compositional analysis of silicon oxide/silicon nitride thin films Cover

Compositional analysis of silicon oxide/silicon nitride thin films

Open Access
|Jun 2016

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DOI: https://doi.org/10.1515/msp-2016-0057 | Journal eISSN: 2083-134X | Journal ISSN: 2083-1331
Language: English
Page range: 315 - 321
Submitted on: Jun 23, 2015
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Accepted on: Apr 28, 2016
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Published on: Jun 10, 2016
In partnership with: Paradigm Publishing Services
Publication frequency: 4 issues per year

© 2016 Samir Meziani, Abderrahmane Moussi, Linda Mahiou, Ratiba Outemzabet, published by Wroclaw University of Science and Technology
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.