Compositional analysis of silicon oxide/silicon nitride thin films
Authors
Language: English
Page range: 315 - 321
Submitted on: Jun 23, 2015
Accepted on: Apr 28, 2016
Published on: Jun 10, 2016
Published by: Wroclaw University of Science and Technology
In partnership with: Paradigm Publishing Services
Publication frequency: 4 issues per year
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© 2016 Samir Meziani, Abderrahmane Moussi, Linda Mahiou, Ratiba Outemzabet, published by Wroclaw University of Science and Technology
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.