Preliminary comparison of three processes of AlN oxidation: dry, wet and mixed ones
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Language: English
Page range: 157 - 163
Submitted on: Aug 16, 2016
Accepted on: Nov 16, 2016
Published on: Apr 27, 2016
Published by: Sciendo
In partnership with: Paradigm Publishing Services
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© 2016 R. Korbutowicz, A. Zakrzewski, published by Sciendo
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