Preliminary comparison of three processes of AlN oxidation: dry, wet and mixed ones
By:
Download Article
Download the full article as a PDF file.
Language: English
Page range: 157 - 163
Submitted on: Aug 16, 2016
Accepted on: Nov 16, 2016
Published on: Apr 27, 2016
Published by: Sciendo
In partnership with: Paradigm Publishing Services
Publication frequency: 4 times per year
Related subjects:
© 2016 R. Korbutowicz, A. Zakrzewski, published by Sciendo
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.