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Preliminary comparison of three processes of AlN oxidation: dry, wet and mixed ones Cover

Preliminary comparison of three processes of AlN oxidation: dry, wet and mixed ones

Materials Science-Poland
Volume 34 (2016): Issue 1 (March 2016)
By:  and    
Open Access
|Apr 2016
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DOI: https://doi.org/10.1515/msp-2016-0010 | Journal eISSN: 2083-134X | Journal ISSN: 2083-1331
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Language: English
Page range: 157 - 163
Submitted on: Aug 16, 2016
Accepted on: Nov 16, 2016
Published on: Apr 27, 2016
Published by: Wroclaw University of Science and Technology
In partnership with: Paradigm Publishing Services
Publication frequency: 4 issues per year
Keywords:
thermal oxidation,
AlN,
Al2O3,
AlON,
EDS,
SE
Related subjects:
Materials sciences,
Materials sciences, other,
Nanomaterials,
Functional and smart materials,
Materials characterization and properties

© 2016 R. Korbutowicz, A. Zakrzewski, published by Wroclaw University of Science and Technology
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

Volume 34 (2016): Issue 1 (March 2016)
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