Preliminary comparison of three processes of AlN oxidation: dry, wet and mixed ones
By: R. Korbutowicz and A. Zakrzewski
DOI: https://doi.org/10.1515/msp-2016-0010 | Journal eISSN: 2083-134X (formerly 2083-124X) | Journal ISSN: 2083-1331
Language: English
Page range: 157 - 163
Submitted on: Aug 16, 2016
Accepted on: Nov 16, 2016
Published on: Apr 27, 2016
Published by: Wroclaw University of Science and Technology
In partnership with: Paradigm Publishing Services
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© 2016 R. Korbutowicz, A. Zakrzewski, published by Wroclaw University of Science and Technology
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.