The application of magnetic self-filter to optimization of AIN film growth process during the impulse plasma deposition synthesis

Chodun, Rafal; Nowakowska-Langier, Katarzyna; Okrasa, Sebastian; Zdunek, Krzysztof

doi:10.1515/msp-2016-0007

References

[1]Guo Q., Yoshida A., Jpn. J. Appl. Phys., 33 (1994), 2453.
Search in Google Scholar Back to article
[2]Teisseyre H., Perlin P., Suski T., Grzegory I., Porowski S., Jun J., Pietraszko A., Moustakas T. D., J. Appl. Phys., 76 (1994), 2429.
Search in Google Scholar Back to article
[3]Yamashita H., Fukui K., Misawa S., Yoshida S., J. Appl. Phys., 50 (1979), 896.
Search in Google Scholar Back to article
[4]Slack G.A., Tanzilli R.A., Pohl R.O., Vandersande J.W., J. Phys. Chem. Solids, 48 (1987), 641.
Search in Google Scholar Back to article
[5]Chiu K.H., Chen J.H., Chen H.R., Huang R.S., Thin Solid Films, 515 (2007), 4819.
Search in Google Scholar Back to article
[6]Yang R.Z., Hsiung C.M., Chen H.H., Wu H.W., Shih M.C., Microwave Optic. Techn. Lett., 50 (2008), 2863.
Search in Google Scholar Back to article
[7]Bose S., Mazumder S.K., Solid State Electron., 62 (2011), 5.
Search in Google Scholar Back to article
[8]Kelekci O., Tasli P., Cetin S.S., Kasap M., Ozcelik S., Ozbay E., Curr. Appl. Phys., 12 (2012), 1600.
Search in Google Scholar Back to article
[9]Iborra E., Olivares J., Clement M., Vergara L., Sanz-Hervás A., Sangrador J., Sensor. Actuat. A-Phys., 115 (2004), 501.
Search in Google Scholar Back to article
[10]Belyanin A.F., Bouilov L.L., Zhirnov V.V., Kamenev A.I., Kovalskij K.A., Spitsyn B.V., Diam. Relat. Mater., 8 (1999), 369.
Search in Google Scholar Back to article
[11]Qiu J.Z., Hotta Z., Watari K., Mitsuishi K., Yamazaki M., J. Eur. Ceram. Soc., 26 (2006), 385.
Search in Google Scholar Back to article
[12]Fischer R.A., Miehr A., Ambacher O., Metzger T., Born E., J. Cryst. Growth, 170 (1997), 139.
Search in Google Scholar Back to article
[13]Tanaka Z., Hasebe Z., Inushima T., Sandhu A., Ohoya S., J. Cryst. Growth, 209 (2000), 410.
Search in Google Scholar Back to article
[14]Dimitrova V., Manova D., Paskova T., Uzunov T., Ivanov N., Dechev D., Vacuum, 51 (1998), 161.
Search in Google Scholar Back to article
[15]Manova D., Dimitrova V., Fukarek W., Karpuzov D., Surf. Coat. Tech., 106 (1998), 205.
Search in Google Scholar Back to article
[16]Nowakowska-Langier K., Wierzbiński E., Zdunek K., Kopcewicz M., Vacuum, 77 (2005), 287.
Search in Google Scholar Back to article
[17]Nowakowska-Langier K., Chodun R., Nietubyc R., Minikayev R., Zdunek K., Appl. Surf. Sci., 275 (2013), 14.
Search in Google Scholar Back to article
[18]Nowakowska-Langier K., Zdunek K., Wierzbinski E., Surf. Coat. Tech., 204 (2010), 2564.
Search in Google Scholar Back to article
[19]Anders S., Anders A., Brown I.G., J. Appl. Phys., 74 (1993), 4239.
Search in Google Scholar Back to article
[20]Anders A., Surf. Coat. Tech., 120 – 121 (1999), 319.
Search in Google Scholar Back to article
[21]Zimmer O., Surf. Coat. Tech., 200 (2005), 440.
Search in Google Scholar Back to article
[22]Zdunek K., Surf. Coat. Tech., 201 (2007), 4813.
Search in Google Scholar Back to article
[23]Zdunek K., Nowakowska-Langier K., Chodun R., Kupczyk M., Siwak P., Vacuum, 85 (2010), 514.
Search in Google Scholar Back to article
[24]Collins A.T., Lightowlers E.C., Dean P.J., Phys. Rev., 158 (1967), 833.
Search in Google Scholar Back to article
[25]Anders A., Thin Solid Films, 518 (2010), 4087.
Search in Google Scholar Back to article

The application of magnetic self-filter to optimization of AIN film growth process during the impulse plasma deposition synthesis

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