The application of magnetic self-filter to optimization of AIN film growth process during the impulse plasma deposition synthesis
References
- Guo Q., Yoshida A.,
Jpn. J. Appl. Phys ., 33 (1994), 2453. - Teisseyre H., Perlin P., Suski T., Grzegory I., Porowski S., Jun J., Pietraszko A., Moustakas T. D.,
J. Appl. Phys ., 76 (1994), 2429. - Yamashita H., Fukui K., Misawa S., Yoshida S.,
J. Appl. Phys ., 50 (1979), 896. - Slack G.A., Tanzilli R.A., Pohl R.O., Vandersande J.W.,
J. Phys. Chem. Solids , 48 (1987), 641. - Chiu K.H., Chen J.H., Chen H.R., Huang R.S.,
Thin Solid Films , 515 (2007), 4819. - Yang R.Z., Hsiung C.M., Chen H.H., Wu H.W., Shih M.C.,
Microwave Optic. Techn. Lett ., 50 (2008), 2863. - Bose S., Mazumder S.K.,
Solid State Electron ., 62 (2011), 5. - Kelekci O., Tasli P., Cetin S.S., Kasap M., Ozcelik S., Ozbay E.,
Curr. Appl. Phys ., 12 (2012), 1600. - Iborra E., Olivares J., Clement M., Vergara L., Sanz-Hervás A., Sangrador J.,
Sensor. Actuat. A-Phys ., 115 (2004), 501. - Belyanin A.F., Bouilov L.L., Zhirnov V.V., Kamenev A.I., Kovalskij K.A., Spitsyn B.V.,
Diam. Relat. Mater ., 8 (1999), 369. - Qiu J.Z., Hotta Z., Watari K., Mitsuishi K., Yamazaki M.,
J. Eur. Ceram. Soc ., 26 (2006), 385. - Fischer R.A., Miehr A., Ambacher O., Metzger T., Born E.,
J. Cryst. Growth , 170 (1997), 139. - Tanaka Z., Hasebe Z., Inushima T., Sandhu A., Ohoya S.,
J. Cryst. Growth , 209 (2000), 410. - Dimitrova V., Manova D., Paskova T., Uzunov T., Ivanov N., Dechev D.,
Vacuum , 51 (1998), 161. - Manova D., Dimitrova V., Fukarek W., Karpuzov D.,
Surf. Coat. Tech ., 106 (1998), 205. - Nowakowska-Langier K., Wierzbiński E., Zdunek K., Kopcewicz M.,
Vacuum , 77 (2005), 287. - Nowakowska-Langier K., Chodun R., Nietubyc R., Minikayev R., Zdunek K.,
Appl. Surf. Sci ., 275 (2013), 14. - Nowakowska-Langier K., Zdunek K., Wierzbinski E.,
Surf. Coat. Tech ., 204 (2010), 2564. - Anders S., Anders A., Brown I.G.,
J. Appl. Phys ., 74 (1993), 4239. - Anders A.,
Surf. Coat. Tech ., 120 – 121 (1999), 319. - Zimmer O.,
Surf. Coat. Tech ., 200 (2005), 440. - Zdunek K.,
Surf. Coat. Tech ., 201 (2007), 4813. - Zdunek K., Nowakowska-Langier K., Chodun R., Kupczyk M., Siwak P.,
Vacuum , 85 (2010), 514. - Collins A.T., Lightowlers E.C., Dean P.J.,
Phys. Rev ., 158 (1967), 833. - Anders A.,
Thin Solid Films , 518 (2010), 4087.
Language: English
Page range: 126 - 131
Submitted on: Jul 21, 2015
Accepted on: Nov 16, 2015
Published on: Apr 27, 2016
Published by: Sciendo
In partnership with: Paradigm Publishing Services
Publication frequency: 4 times per year
Keywords:
Related subjects:
© 2016 Rafal Chodun, Katarzyna Nowakowska-Langier, Sebastian Okrasa, Krzysztof Zdunek, published by Sciendo
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.