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The application of magnetic self-filter to optimization of AIN film growth process during the impulse plasma deposition synthesis Cover

The application of magnetic self-filter to optimization of AIN film growth process during the impulse plasma deposition synthesis

Materials Science-Poland
Volume 34 (2016): Issue 1 (March 2016)
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Open Access
|Apr 2016

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DOI: https://doi.org/10.1515/msp-2016-0007 | Journal eISSN: 2083-134X | Journal ISSN: 2083-1331
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Language: English
Page range: 126 - 131
Submitted on: Jul 21, 2015
Accepted on: Nov 16, 2015
Published on: Apr 27, 2016
Published by: Sciendo
In partnership with: Paradigm Publishing Services
Publication frequency: 4 times per year
Keywords:
IPD method,
magnetic filter,
nanocrystalline films,
thin films
Related subjects:
Materials sciences,
Materials sciences, other,
Nanomaterials,
Functional and smart materials,
Materials characterization and properties

© 2016 Rafal Chodun, Katarzyna Nowakowska-Langier, Sebastian Okrasa, Krzysztof Zdunek, published by Sciendo
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

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