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The application of magnetic self-filter to optimization of AIN film growth process during the impulse plasma deposition synthesis Cover

The application of magnetic self-filter to optimization of AIN film growth process during the impulse plasma deposition synthesis

Open Access
|Apr 2016

Authors

Katarzyna Nowakowska-Langier

Poland

Sebastian Okrasa

Poland

Krzysztof Zdunek

Poland
DOI: https://doi.org/10.1515/msp-2016-0007 | Journal eISSN: 2083-134X | Journal ISSN: 2083-1331
Language: English
Page range: 126 - 131
Submitted on: Jul 21, 2015
Accepted on: Nov 16, 2015
Published on: Apr 27, 2016
Published by: Sciendo
In partnership with: Paradigm Publishing Services
Publication frequency: 4 times per year

© 2016 Rafal Chodun, Katarzyna Nowakowska-Langier, Sebastian Okrasa, Krzysztof Zdunek, published by Sciendo
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.