The application of magnetic self-filter to optimization of AIN film growth process during the impulse plasma deposition synthesis
Authors
Katarzyna Nowakowska-Langier
Poland
Sebastian Okrasa
Poland
Krzysztof Zdunek
Poland
Language: English
Page range: 126 - 131
Submitted on: Jul 21, 2015
Accepted on: Nov 16, 2015
Published on: Apr 27, 2016
Published by: Sciendo
In partnership with: Paradigm Publishing Services
Publication frequency: 4 times per year
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© 2016 Rafal Chodun, Katarzyna Nowakowska-Langier, Sebastian Okrasa, Krzysztof Zdunek, published by Sciendo
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.