Surface morphology of titanium nitride thin films synthesized by DC reactive magnetron sputtering
Language: English
Page range: 137 - 143
Submitted on: Jul 25, 2014
|Accepted on: Oct 7, 2014
|Published on: Mar 13, 2015
Published by: Wroclaw University of Science and Technology
In partnership with: Paradigm Publishing Services
Publication frequency: 4 issues per year
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© 2015 Ştefan Ţǎlu, Sebastian Stach, Shahoo Valedbagi, S. Mohammad Elahi, Reza Bavadi, published by Wroclaw University of Science and Technology
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.