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On Both Spatial And Velocity Distribution Of Sputtered Particles In Magnetron Discharge Cover

On Both Spatial And Velocity Distribution Of Sputtered Particles In Magnetron Discharge

Annals of West University of Timisoara - Physics
Volume 56 (2012): Issue 1 (December 2012)
By: ,  ,  ,   and    
Open Access
|Oct 2015
References

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DOI: https://doi.org/10.1515/awutp-2015-0007 | Journal eISSN: 2784-1057 (formerly 1224-9718) | Journal ISSN: 1224-9718
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Language: English
Page range: 43 - 57
Submitted on: Dec 28, 2011
Accepted on: Jan 19, 2012
Published on: Oct 5, 2015
Published by: West University of Timisoara
In partnership with: Paradigm Publishing Services
Publication frequency: 1 issue per year
Keywords:
pulsed magnetron,
tunable diode laser spectroscopy,
neutral distributions
Related subjects:
Materials sciences,
Modeling and simulations,
Physics,
Theoretical and mathematical physics,
Condensed matter physics,
Medical physics

© 2015 C. Vitelaru, V. Pohoata, V. Tiron, C. Costin, G. Popa, published by West University of Timisoara
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

Volume 56 (2012): Issue 1 (December 2012)
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