On Both Spatial And Velocity Distribution Of Sputtered Particles In Magnetron Discharge
By: C. Vitelaru, V. Pohoata, V. Tiron, C. Costin and G. Popa
Language: English
Page range: 43 - 57
Submitted on: Dec 28, 2011
Accepted on: Jan 19, 2012
Published on: Oct 5, 2015
Published by: West University of Timisoara
In partnership with: Paradigm Publishing Services
Publication frequency: 1 issue per year
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© 2015 C. Vitelaru, V. Pohoata, V. Tiron, C. Costin, G. Popa, published by West University of Timisoara
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.