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Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods: ProcessProperties and Applications Cover

Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods: ProcessProperties and Applications

Publisher:Bentham Science
By: Filipe Vaz,  Nicolas Martin and  Martin Fenker  
Paid access
|Jul 2013
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PDF ISBN: 978-1-60805-156-4
Publisher: Bentham Science
Copyright owner: © 2013 Bentham Science Publishers
Publication date: 2013
Language: English
Pages: 362
Related subjects:
Engineering,
Mechanical engineering,
Materials engineering

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