Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods: ProcessProperties and Applications Cover

Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods: ProcessProperties and Applications

Publisher:Bentham Science

By: Filipe Vaz, Nicolas Martin and Martin Fenker

Paid access

|Jul 2013

E-Book €35.99Institutions €151.95

E-Book €35.99Institutions €151.95

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PDF ISBN: 978-1-60805-156-4

Publisher: Bentham Science

Copyright owner: © 2013 Bentham Science Publishers

Publication date: 2013

Language: English

Pages: 362

Related subjects:

Mechanical engineering,

Materials engineering

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