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Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods: ProcessProperties and Applications Cover

Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods: ProcessProperties and Applications

Publisher:Bentham Science
By: Filipe Vaz,  Nicolas Martin and  Martin Fenker  
Paid access
|Jul 2013
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Oxynitride thin film technology is rapidly impacting a broad spectrum of applicationsranging from decorative functions (through optoelectronics) to corrosion resistance. Developing a better understanding of the relationships between deposition processesstructure and composition of the deposited films is critical to the continued evolution of these applications. This e-book provides valuable information about the process modelingfabrication and characterization of metallic oxynitride-based thin films produced by reactive sputtering and some related deposition processes. Its contents are spread in twelve main and concise chapters through which the book thoroughly reviews the bases of oxynitride thin film technology and deposition processessputtering processes and the resulting behaviors of these oxynitride thin films. More importantlythe solutions for the growth of oxynitride technology are given in detail with an emphasis on some particular compounds. This is a valuable resource for academic learners studying materials science and industrial coaterswho are concerned not only about fundamental aspects of oxynitride synthesisbut also by their innate material characteristics.
PDF ISBN: 978-1-60805-156-4
Publisher: Bentham Science
Copyright owner: © 2013 Bentham Science Publishers
Publication date: 2013
Language: English
Pages: 362
Related subjects:
Engineering,
Mechanical engineering,
Materials engineering

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